Capacitive pressure sensor

• US 8,333,118 B2
• Filed: 02/01/2011
• Issued: 12/18/2012
• Est. Priority Date: 02/02/2010
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Blankenship, Steven D.
• Primary Examiner(s): ALLEN, ANDRE J
• Application Number:
  US13/018,941
• Publication Number:
  US 20120031190A1
• Time in Patent Office: 686 Days
• Field of Search: 73700-756
• US Class Current: 73/718
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

An improved capacitive manometer includes a diaphragm including a common electrode and an electrode structure including a center electrode and ring electrode. The diaphragm is movable between (i) a zero position when the pressure on each side of the diaphragm is the same and (ii) a maximum differential position when the maximum measurable differential pressure is applied to the diaphragm. A support structure is arranged to support the diaphragm so that the diaphragm is constrained relative to the electrode structure. The common electrode is spaced from and axially aligned with the center and ring electrodes. The electrode structure is secured relative to the diaphragm at at least three clamping locations. The angle defined within each right plane containing a point of constraint of the diaphragm and the point of each clamping location relative to the plane of the diaphragm in the zero position is between 60° and 90°.

Claims

1. A capacitive manometer comprising:

a diaphragm including (a) a common electrode and (b) an electrode structure including a center electrode and ring electrode, wherein the diaphragm is movable between (i) a zero position when the pressure on each side of the diaphragm is the same and (ii) a maximum differential position when the maximum measurable differential pressure is applied to the diaphragm, and

a support structure arranged so as to support the diaphragm so that the diaphragm is constrained relative to the electrode structure, and the common electrode is spaced from and axially aligned with the center and ring electrodes relative to an alignment axis of the manometer;

wherein the electrode structure is secured relative to the diaphragm at at least three clamping locations angularly spaced around the alignment axis; and

wherein the angle defined within each right plane containing a point of constraint of the diaphragm and the point of each clamping location relative to the plane of the diaphragm in the zero position is between 60° and

90°

so as to reduce changes in electrode disk support height, enable smaller gaps and improved stability between the diaphragm and electrode structure.

2. A capacitive manometer according to claim 1, wherein the support structure includes a substrate configured to support the electrode structure.

3. A capacitive manometer according to claim 2, wherein the support structure includes a spring configured to secure the substrate relative to the diaphragm at the at least three locations.

4. A capacitive manometer according to claim 3, wherein the spring is a wave spring configured so as to apply force on the substrate at a right angle to the plane of the diaphragm in the zero position.

5. A capacitive manometer comprising:

a diaphragm including (a) a common electrode and (b) an electrode structure including a center electrode and ring electrode, wherein the diaphragm is movable between (i) a zero position when the pressure on each side of the diaphragm is the same and (ii) a maximum differential position when the maximum measurable differential pressure is applied to the diaphragm;

a support structure arranged so as to support the diaphragm so that the common electrode is spaced from and axially aligned with the center and ring electrodes relative to an alignment axis of the manometer;

a spacer ring including a plurality of tabs; and

a clamp arranged to clamp the electrode structure to the spacer ring at the location of each of the tabs so as to define a plurality of equiangularly spaced, clamped locations around the alignment axis.

6. A capacitive manometer according to claim 5, wherein the electrode structure is clamped to the spacer ring at three locations spaced apart 120°

from one another, and the spacer ring includes three tabs equiangularly spaced 120°

from one another, and positioned 60°

from the adjacent clamped locations.