RF matching network of a vacuum processing chamber and corresponding configuration methods
First Claim
1. An RF matching network comprising:
- a set of n RF input ports, each port adapted to be connected to one of a set of RF generators, each RF generator generating at least one frequency that is different from frequencies of other RF generators in the set;
an output port in electrical communication with a vacuum processing chamber; and
a set of n match circuits, each match circuit being connected to the output port and to one of the n RF input ports,wherein each match circuit has a high output impedance with respect to all RF generator frequencies other than one frequency of the RF generator to which the match circuit is adapted to be connected, andwherein at least one match circuit comprises a multi-spacing inductor having first and second clearances between wires of the inductor, the first clearance being different from the second clearance.
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Accused Products
Abstract
A RF matching network is described, and which includes a 1st to nth RF generators, and wherein each RF generator has a different frequency, and wherein the frequencies of the 1st to the nth RF input ports decline in sequence, and wherein between the ith frequency RF input port, and the output port is a ith circuit, which has a high impedance at the output port to all RF generator frequencies other than the ith frequency; and wherein the ith circuit, when connected to a RF generator with the ith frequency, and wherein measuring from the output port to the ith circuit, the ith circuit has a first impedance at the ith frequency; and when measuring from the output port in the opposite direction to the ith circuit, the ith circuit has a second impedance at the ith frequency; and wherein the first impedance is a substantial conjugate match of the second impedance.
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Citations
23 Claims
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1. An RF matching network comprising:
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a set of n RF input ports, each port adapted to be connected to one of a set of RF generators, each RF generator generating at least one frequency that is different from frequencies of other RF generators in the set; an output port in electrical communication with a vacuum processing chamber; and a set of n match circuits, each match circuit being connected to the output port and to one of the n RF input ports, wherein each match circuit has a high output impedance with respect to all RF generator frequencies other than one frequency of the RF generator to which the match circuit is adapted to be connected, and wherein at least one match circuit comprises a multi-spacing inductor having first and second clearances between wires of the inductor, the first clearance being different from the second clearance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for supplying RF energy to a vacuum processing chamber, the method comprising:
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connecting a first frequency RF input port to a first frequency RF generator; connecting a second frequency RF input port to a second frequency RF generator; providing an output port that outputs energy produced by the respective RF generators to a vacuum processing chamber, wherein the first frequency is higher than the second frequency; providing a first circuit located between the first frequency RF input and the output port, and which is further connected to the first frequency RF generator, wherein the first circuit has high output impedance with respect to the second frequency; and providing a second circuit between the second frequency RF input and the output port, and which is further connected to the second frequency RF generator, wherein the second circuit has a high output impedance with respect to the first frequency, and wherein the second circuit comprises a multi-spacing inductor having first and second clearances between wires of the inductor, the first clearance being different from the second clearance. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. An RF matching network comprising:
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a plurality of n RF generators, each RF generator having a different frequency; a set of n RF input ports, each port being connected to one of the RF generators; an output port in electrical communication with a vacuum processing chamber; and a set of n match circuits, each match circuit being connected to the output port and to one of the n RF input ports, wherein each match circuit has a high output impedance with respect to all RF generator frequencies other than the frequency of the RF generator to which the match circuit is connected, and wherein at least one match circuit comprises;
(i) a conducting piece connected directly to the respective RF input port, and (ii) a variable capacitor connected directly to and in series with both the conducting piece and the input port.
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23. An RF matching network comprising:
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a set of n match circuits, each match circuit comprising;
(i) an input port adapted for electrical communication with an RF generator, and (ii) an output port adapted for electrical communication with a vacuum processing chamber,wherein each match circuit has a high output impedance with respect to a distinct set of (n−
1) RF generator frequencies, andwherein at least one match circuit comprises an inductor having first and second clearances between wires of the inductor, the first clearance being different from the second clearance.
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Specification