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Acoustic wave device and electronic apparatus using the same

  • US 8,334,737 B2
  • Filed: 07/15/2010
  • Issued: 12/18/2012
  • Est. Priority Date: 07/15/2009
  • Status: Active Grant
First Claim
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1. An acoustic wave device comprising:

  • a piezoelectric substrate;

    an interdigital transducer (IDT) electrode provided on the piezoelectric substrate;

    an internal electrode provided above the piezoelectric substrate and electrically connected to the IDT electrode;

    a side wall provided above the internal electrode and surrounding the IDT electrode;

    a lid provided on the side wall for covering the IDT electrode to provide a space above the IDT electrode;

    an electrode base layer provided on the internal electrode and outside the space and the side wall;

    a connection electrode provided on the electrode base layer; and

    an anti-corrosion layer provided between the internal electrode and the side wall, the anti-corrosion layer protruding outside the side wall, the anti-corrosion layer being made of material less soluble in plating solution than the internal electrode.

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