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Charged particle beam apparatus

  • US 8,335,397 B2
  • Filed: 05/21/2008
  • Issued: 12/18/2012
  • Est. Priority Date: 05/22/2007
  • Status: Active Grant
First Claim
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1. A charged particle beam apparatus comprising:

  • a scanning section that scans a sample two-dimensionally, in first and second directions, with a charged particle beam so as to display an image of the scanned region with a signal based on a charged particle beam from the sample detected by the scanning, wherein the scanning section employs a partitioning and interlacing method in which a plurality of partitioned regions are defined by partitioning a region to be scanned, in the second direction, that is different from the first direction, and scanning in the first direction is performed for every partitioned region sequentially in a skipping manner; and

    ,an image processing section for removing an artifact that is attributable to the scanning;

    wherein the image processing section removes the artifact by a processing based on a frequency of the artifact that is pre-evaluated according to the size of the partitioned region in the second direction.

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