Charged particle beam apparatus
First Claim
1. A charged particle beam apparatus comprising:
- a scanning section that scans a sample two-dimensionally, in first and second directions, with a charged particle beam so as to display an image of the scanned region with a signal based on a charged particle beam from the sample detected by the scanning, wherein the scanning section employs a partitioning and interlacing method in which a plurality of partitioned regions are defined by partitioning a region to be scanned, in the second direction, that is different from the first direction, and scanning in the first direction is performed for every partitioned region sequentially in a skipping manner; and
,an image processing section for removing an artifact that is attributable to the scanning;
wherein the image processing section removes the artifact by a processing based on a frequency of the artifact that is pre-evaluated according to the size of the partitioned region in the second direction.
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Abstract
In a method and apparatus for removing artifacts from an image generated a charged partial beam scanning device, a scanning method is determined, and the frequency of an artifact appearing on an image can then be determined, based on scanning method. A step 703, a frequency domain for removing an artifact can be determined from the vertical and horizontal widths determined by experimentation in advance with respect to the frequency position Photography is performed to obtain an image, which is Fourier transformed and the determined frequency domain is replaced, for example, by “0.” The resulting image is subjected to inverse Fourier transformation, and displayed and stored. The flow of such processing enables decreasing an artifact appearing on an image, depending on a scanning method. The frequency domain (vertical and horizontal widths) that is to be eliminated and a method for replacement by “0” are determined in advance, depending on the kind of inspected samples and a method can be selected depending on the kind of samples.
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Citations
7 Claims
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1. A charged particle beam apparatus comprising:
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a scanning section that scans a sample two-dimensionally, in first and second directions, with a charged particle beam so as to display an image of the scanned region with a signal based on a charged particle beam from the sample detected by the scanning, wherein the scanning section employs a partitioning and interlacing method in which a plurality of partitioned regions are defined by partitioning a region to be scanned, in the second direction, that is different from the first direction, and scanning in the first direction is performed for every partitioned region sequentially in a skipping manner; and
,an image processing section for removing an artifact that is attributable to the scanning; wherein the image processing section removes the artifact by a processing based on a frequency of the artifact that is pre-evaluated according to the size of the partitioned region in the second direction. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of operating
a charged particle beam apparatus, the method comprising: -
scanning a sample two-dimensionally, in first and second directions, with a charged particle beam so as to display an image of the scanned region with a signal based on a charged particle beam from the sample detected by the scanning, wherein the scanning employs a partitioning and interlacing method in which scanning in the first direction is performed for partitioned regions sequentially in a skipping manner; defining the partitioned regions by partitioning a region to be scanned, in the second direction that is different from the first direction, into a plurality of regions; and carrying out image processing for removing an artifact that is attributable to the scanning;
wherein the artifact is removed by a processing based on a frequency of the artifact that is pre-evaluated according to the size of the partitioned regions in the second direction.
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Specification