Angular velocity sensor
First Claim
1. An angular velocity sensor comprising:
- a support substrate;
a reference vibrator supported from a peripheral portion by a first support member formed on the support substrate so as to generate reciprocating rotational vibration about a first rotation axis as a center;
a detection vibrator supported from a peripheral portion by a second support member formed on the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center;
a reference vibration generating unit constructed to allow the reference vibrator to generate reciprocating rotational vibration; and
a detection unit coupled to the reference vibrator constructed to detect a relative displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator, wherein the detection unit includes a unit for detecting an electrostatic capacity between the reference vibrator and the detection vibrator.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided is an angular velocity sensor including: a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator.
-
Citations
13 Claims
-
1. An angular velocity sensor comprising:
-
a support substrate; a reference vibrator supported from a peripheral portion by a first support member formed on the support substrate so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported from a peripheral portion by a second support member formed on the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit constructed to allow the reference vibrator to generate reciprocating rotational vibration; and a detection unit coupled to the reference vibrator constructed to detect a relative displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator, wherein the detection unit includes a unit for detecting an electrostatic capacity between the reference vibrator and the detection vibrator. - View Dependent Claims (2, 3, 4)
-
-
5. An angular velocity sensor comprising:
-
a support substrate; a reference vibrator supported from a peripheral portion by a first support member formed on the support substrate so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported from a peripheral portion by a second support member formed on the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit constructed to allow the reference vibrator to generate reciprocating rotational vibration; and a detection unit coupled to the reference vibrator constructed to detect a relative displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator, wherein the reference vibrator and the detection vibrator are disposed so as to have an opposing surface, and at least one of the reference vibrator or the detection vibrator has a through-hole or a recessed portion on the opposing surface. - View Dependent Claims (6, 7, 8, 9)
-
-
10. An angular velocity sensor comprising:
-
a support substrate; a reference vibrator supported from a peripheral portion by a first support member formed on the support substrate so as to generate reciprocating rotational vibration about a first rotation axis as a center; a first detection vibrator supported from a peripheral portion by a second support member formed on the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a second detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a third rotation axis, which is perpendicular to the second rotation axis, as a center, a reference vibration generating unit constructed to allow the reference vibrator to generate reciprocating rotational vibration; a detection unit coupled to the reference vibrator constructed to detect a relative displacement amount of the first detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the first detection vibrator and a relative displacement amount of the second detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the second detection vibrator. - View Dependent Claims (11)
-
-
12. An angular velocity sensor comprising:
-
a support substrate; a reference vibrator supported from a peripheral portion by a first support member formed on the support substrate so as to generate reciprocating rotational vibration about a first rotation axis as a center; a first detection vibrator including a detection unit supported from a peripheral portion by a second support member so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a second detection vibrator including a detection unit supported from a peripheral portion by a third support member so as to generate reciprocating rotational vibration about a third rotation axis, which is different from the first rotation axis and the second rotation axis, as a center; a reference vibration generating unit constructed to allow the reference vibrator to generate reciprocating rotational vibration; and a detection unit constructed to detect a relative displacement amount of the first detection vibrator or the second detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the first detection vibrator or the second detection vibrator, wherein the first detection vibrator and the second detection vibrator are configured so as to conduct reciprocating rotation together with the reference vibrator, about the first rotation axis as a center. - View Dependent Claims (13)
-
Specification