Microfabricated implantable wireless pressure sensor for use in biomedical applications and pressure measurement and sensor implantation methods
First Claim
1. A variable capacitor of a microfabricated implantable pressure sensor, comprising:
- a substrate defining a plurality of channels;
a flexible member having first and second edges on the substrate and a middle portion extending between the first and second edges and raised above the substrate to define a chamber between the substrate and the middle portion; and
a plurality of capacitor elements extending indirectly from the flexible member, the plurality of capacitor elements being movable within respective channels with changes of fluid pressure on an outer surface of the flexible member, capacitance varying with changes in an overlapping area of the plurality of capacitor elements and the substrate.
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Accused Products
Abstract
A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors include a flexible member that is disposed on a substrate and defines a chamber. Capacitor elements extend indirectly from the flexible member. Sufficient fluidic pressure applied to an exterior surface of the flexible member causes the flexible member to move or deform, thus causing the capacitance and/or inductance to change. Resulting changes in resonant frequency or impedance can be detected to determine pressure, e.g., intraocular pressure.
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Citations
9 Claims
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1. A variable capacitor of a microfabricated implantable pressure sensor, comprising:
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a substrate defining a plurality of channels; a flexible member having first and second edges on the substrate and a middle portion extending between the first and second edges and raised above the substrate to define a chamber between the substrate and the middle portion; and a plurality of capacitor elements extending indirectly from the flexible member, the plurality of capacitor elements being movable within respective channels with changes of fluid pressure on an outer surface of the flexible member, capacitance varying with changes in an overlapping area of the plurality of capacitor elements and the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification