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Segregating wafer carrier types in semiconductor storage devices

  • US 8,337,133 B2
  • Filed: 06/25/2007
  • Issued: 12/25/2012
  • Est. Priority Date: 06/25/2007
  • Status: Active Grant
First Claim
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1. A method for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation comprising the steps of:

  • identifying the type of the wafer carrier, wherein identifying the type of wafer carrier comprises identifying the model of the wafer carrier and the material used to construct the wafer carrier;

    determining the compatibility of the identified wafer carrier type with the stocker by comparing the identified wafer carrier type to a predetermined list of approved wafer carrier types for the stocker; and

    executing an action sequence responsive to determining the identified wafer carrier type is not compatible with the stocker.

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