Segregating wafer carrier types in semiconductor storage devices
First Claim
1. A method for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation comprising the steps of:
- identifying the type of the wafer carrier, wherein identifying the type of wafer carrier comprises identifying the model of the wafer carrier and the material used to construct the wafer carrier;
determining the compatibility of the identified wafer carrier type with the stocker by comparing the identified wafer carrier type to a predetermined list of approved wafer carrier types for the stocker; and
executing an action sequence responsive to determining the identified wafer carrier type is not compatible with the stocker.
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Accused Products
Abstract
A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation is disclosed. The system comprises a stocker that accepts wafer carriers via one or more input ports. The present invention provides a means for detecting the presence of a wafer carrier at the input port, means for identifying the type of the wafer carrier, and means for executing an action sequence if the stocker is not compatible with those wafer carriers. Upon detecting an erroneous condition, an action sequence is executed which may include prevention entry of the wafer carrier, and notifying an operator.
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Citations
9 Claims
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1. A method for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation comprising the steps of:
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identifying the type of the wafer carrier, wherein identifying the type of wafer carrier comprises identifying the model of the wafer carrier and the material used to construct the wafer carrier; determining the compatibility of the identified wafer carrier type with the stocker by comparing the identified wafer carrier type to a predetermined list of approved wafer carrier types for the stocker; and executing an action sequence responsive to determining the identified wafer carrier type is not compatible with the stocker. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification