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Program for controlling laser apparatus and recording medium for recording program for controlling laser apparatus and capable of being read out by computer

  • US 8,338,216 B2
  • Filed: 09/03/2009
  • Issued: 12/25/2012
  • Est. Priority Date: 11/30/2001
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a semiconductor device comprising steps of:

  • forming a semiconductor film provided with a marker in accordance with information on computer aided design masks for forming a thin film transistor including a source, channel and drain over a substrate;

    extracting a positional and directional information of the source, channel and drain from the information on computer aided design masks;

    obtaining an optimum driving condition of a laser system by considering speed of drive of the laser system and time required for changing drives of the laser system in accordance with the positional and directional information; and

    minimizing laser treatment time for crystallizing the semiconductor film by selectively irradiating the semiconductor film with a laser beam in accordance with the optimum driving condition of the laser system.

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