Oscillator device
First Claim
1. An oscillator device comprising a movable body oscillatably supported about a rotation axis by a support portion, wherein the movable body is separated into plural electrically separated conductive regions in a thickness direction of the movable body, wherein at least one of the plural electrically separated conductive regions in the thickness direction of the movable body further has plural electrically separated conductive regions that are separated in a direction perpendicular to the thickness direction by an insulating film, and wherein the plural electrically separated conductive regions in the thickness direction of the movable body and the plural electrically separated conductive regions in the direction perpendicular to the thickness direction are each electrically connected to the support portion via a support spring.
1 Assignment
0 Petitions
Accused Products
Abstract
An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.
24 Citations
8 Claims
- 1. An oscillator device comprising a movable body oscillatably supported about a rotation axis by a support portion, wherein the movable body is separated into plural electrically separated conductive regions in a thickness direction of the movable body, wherein at least one of the plural electrically separated conductive regions in the thickness direction of the movable body further has plural electrically separated conductive regions that are separated in a direction perpendicular to the thickness direction by an insulating film, and wherein the plural electrically separated conductive regions in the thickness direction of the movable body and the plural electrically separated conductive regions in the direction perpendicular to the thickness direction are each electrically connected to the support portion via a support spring.
Specification