Inductor element, inductor element manufacturing method, and semiconductor device with inductor element mounted thereon
First Claim
1. An inductor element formed in a multiple layer lead structure comprising:
- a lead,an insulative layer that insulates leads above and below, anda via provided in the insulative layer and connecting leads above and below,wherein lead layers are multiply laminated layers, comprising at least a portion of at least a pair of vertically adjacent leads which are coiled leads;
wherein the coiled leads are connected in series,wherein at least two of the coiled leads comprise a shape having one wind;
wherein a shape having said one wind does not completely coil around and has a notch in a portion thereof;
wherein current directions of vertically adjacent coiled leads are the same by a via provided on an end portion thereof, and form a serial inductance; and
wherein an inter-lead capacitance of the vertically adjacent coiled leads is larger than an inter-lead capacitance between other coiled leads formed in the same lead layer.
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Abstract
An inductor element is formed in a multiple layer lead structure including a lead, an insulative layer that insulates leads above and below, and a via provided in the insulative layer and connecting leads above and below wherein lead layers are multiply laminated layers, characterized in that: at least a portion of at least a pair of vertically adjacent leads are coiled leads; the coiled leads are connected in series, wherein current directions of vertically adjacent coiled leads are the same by a via provided on an end portion thereof, and form a serial inductance; and an inter-lead capacitance of the vertically adjacent coiled leads is larger than an inter-lead capacitance between other coiled leads formed in the same lead layer.
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Citations
27 Claims
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1. An inductor element formed in a multiple layer lead structure comprising:
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a lead, an insulative layer that insulates leads above and below, and a via provided in the insulative layer and connecting leads above and below, wherein lead layers are multiply laminated layers, comprising at least a portion of at least a pair of vertically adjacent leads which are coiled leads; wherein the coiled leads are connected in series, wherein at least two of the coiled leads comprise a shape having one wind; wherein a shape having said one wind does not completely coil around and has a notch in a portion thereof; wherein current directions of vertically adjacent coiled leads are the same by a via provided on an end portion thereof, and form a serial inductance; and wherein an inter-lead capacitance of the vertically adjacent coiled leads is larger than an inter-lead capacitance between other coiled leads formed in the same lead layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A method for manufacturing an inductor element, comprising:
- forming a lead layer wherein a coiled lead on an insulative film and a via that connects coiled leads are provided;
laminating lead layers wherein an inter-lead capacitance of the vertically adjacent coiled leads is larger than an inter-lead capacitance between other coiled leads formed in the same lead layer; and forming a draw out lead for electrically connecting the coiled lead to an external element, wherein at least two of the coiled leads comprise a shape having one wind; and wherein a shape having said one wind does not completely coil around and has a notch in a portion thereof.
- forming a lead layer wherein a coiled lead on an insulative film and a via that connects coiled leads are provided;
Specification