Diffraction based overlay metrology tool and method

• US 8,339,595 B2
• Filed: 12/09/2008
• Issued: 12/25/2012
• Est. Priority Date: 12/17/2007
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Den Boef, Arie Jeffrey
• Primary Examiner(s): NGUYEN, TU T
• Application Number:
  US12/747,795
• Publication Number:
  US 20100328655A1
• Time in Patent Office: 1,477 Days
• Field of Search: None
• US Class Current: 356/237.5
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G03F 7/7015 Details of optical elements
• CPC Class Codes: G03F 7/70633 Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching

Abstract

Systems, methods, and apparatus are provided for determining overlay of a pattern on a substrate with a mask pattern defined in a resist layer on top of the pattern on the substrate. A first grating is provided under a second grating, each having substantially identical pitch to the other, together forming a composite grating. A first illumination beam is provided under an angle of incidence along a first horizontal direction. The intensity of a diffracted beam from the composite grating is measured. A second illumination beam is provided under the angle of incidence along a second horizontal direction. The second horizontal direction is opposite to the first horizontal direction. The intensity of the diffracted beam from the composite grating is measured. The difference between the diffracted beam from the first illumination beam and the diffracted beam from the second illumination beam, linearly scaled, results in the overlay error.

Claims

1. A method for determining an overlay error between a first pattern on a surface of a substrate and a second pattern superimposed on the first pattern, the first pattern comprising a first grating and the second pattern comprising a second grating on top of the first grating, the second grating having substantially identical pitch as the first grating, the second and first gratings forming a composite grating, the method comprising:

providing a first illumination beam for illuminating at least the composite grating under an angle of incidence such that the first illumination beam propagates along a direction that has a component along a first horizontal direction along the surface of the substrate, the substrate being in a fixed position;

measuring, at an image plane, a first intensity of a diffracted beam from the composite grating;

providing a second illumination beam for illuminating at least the composite grating under the angle of incidence such that the second illumination beam propagates along a direction that has a component along a second horizontal direction along the surface of the substrate, wherein the second horizontal direction is opposite to the first horizontal direction, the substrate being in the fixed position; and

measuring a second intensity of a diffracted beam from the composite grating at the image plane.

2. The method according to claim 1, further comprising:

determining an intensity difference between the first intensity and the second intensity, the intensity difference being proportional to the overlay error between the first grating and the second grating.

3. The method according to claim 1, wherein the first and second illumination beams are portions of a common illumination beam.

4. The method according to claim 3, wherein the common illumination beam has an annular cross-section.

5. The method according to claim 1, wherein the angle of incidence is oblique relative to the surface of the substrate, a diffraction angle of the first order diffraction beams relative to the normal of the surface being smaller than the angle of incidence.

6. The method according to claim 1, wherein the angle of incidence is substantially perpendicular to the surface of the substrate, the method further comprising:

using the first illumination beam as the second illumination beam,

wherein the measuring of the first intensity of the diffracted beam from the composite grating and the measuring of the second intensity of the diffracted beam from the composite grating are performed consecutively during provision of the first illumination beam.

7. The method according to claim 1, wherein:

measuring the first intensity comprises

detecting an image of the composite grating obtained by only a first order diffracted beam by pattern recognition, and

measuring the second intensity comprises

detecting an image of the composite grating obtained by only a negative first order diffracted beam by pattern recognition.

8. The method according to claim 7, comprising:

blocking beams of diffraction order other than the first diffraction order when providing the first illumination beam; and

blocking beams of diffraction order other than the negative first diffraction order when providing the second illumination beam.

9. The method according to claim 1, further comprising:

providing a additional composite grating on the substrate, the additional composite grating formed by a third grating in the first pattern and a fourth grating on top of the first grating, the third grating and the fourth grating having a substantially identical pitch as the first and the second grating, wherein the composite grating is biased with a first shift in a shift direction along a grating direction and the additional composite grating is biased with a second shift in the shift direction along the grating direction, the first shift being different from the second shift;

providing the first illumination beam for illuminating the additional composite grating under the angle of incidence such that the first illumination beam propagates along a direction that has a component along the first horizontal direction along the surface of the substrate, the substrate being in the fixed position;

measuring, at the image plane, a first intensity of a diffracted beam from the additional composite grating;

providing the second illumination beam for illuminating the additional composite grating under the angle of incidence such that the second illumination beam propagates along a direction that has a component along the second horizontal direction along the surface of the substrate; and

measuring a second intensity of a diffracted beam from the additional composite grating at the image plane.

10. The method according to claim 1, wherein:

measuring the first intensity comprises detecting an image of the composite grating obtained by only a zero order diffracted beam by pattern recognition, and

measuring the second intensity comprises detecting an image of the composite grating obtained by only a zero order diffracted beam by pattern recognition.

11. A detection system configured to determine an overlay error between a first pattern on a surface of a substrate and a second pattern superimposed on the first pattern, the first pattern comprising a first grating and the second pattern comprising a second grating on top of the first grating, the second grating having substantially identical pitch as the first grating, the second and first gratings forming a composite grating, the system comprising:

an illumination source configured to (a) form a first illumination beam for illuminating the composite grating on the substrate under an angle of incidence such that the first illumination beam propagates along a direction that has a component along a first horizontal direction along the surface of the substrate, the substrate being in a substrate position and (b) to form a second illumination beam for illuminating the composite grating on the substrate under an angle of incidence such that the second illumination beam propagates along a direction that has a component along a second horizontal direction along the surface of the substrate, wherein the second horizontal direction is opposite to the first horizontal direction, the substrate being in the substrate position;

an image detector configured to receive, at an image plane, a diffracted beam from the composite grating;

a plurality of lenses arranged along an optical path between the substrate position and the image detector; and

an aperture stop.

12. The detection system according to claim 11, wherein the image detector is configured to detect an image of the composite grating using only first order diffraction beams by a pattern recognition method.

13. The detection system according to claim 12, wherein the aperture stop of the detection system is configured to block beams of diffraction order other than the first diffraction order when forming the first illumination beam, and to block beams of diffraction order other than a negative first diffraction order when forming the second illumination beam.

14. The detection system according to claim 11, wherein the plurality of lenses comprises at least an objective lens adjacent to the surface of the substrate and a projection lens adjacent to the image detector, the aperture stop arranged along the optical path between the objective lens and the projection lens, and

wherein the objective lens has a first numerical aperture value and the aperture stop has a second numerical aperture value, the second numerical aperture value being smaller than the first numerical aperture value.

15. The detection system according to claim 11, wherein the image detector is configured to detect an image of the composite grating using only a zero order diffraction beam by a pattern recognition method.

16. A lithographic apparatus comprising a detection system configured to determine an overlay error between a first pattern on a surface of a substrate and a second pattern superimposed on the first pattern, the first pattern comprising a first grating and the second pattern comprising second grating on top of the first grating, the second grating having substantially identical pitch as the first grating, the second and first gratings forming a composite grating, the system comprising:

an illumination source configured to (a) form a first illumination beam for illuminating the composite grating on the substrate under an angle of incidence such that the first illumination beam propagates along a direction that has a component along a first horizontal direction along the surface of the substrate, the substrate being in a substrate position and (b) to form a second illumination beam for illuminating the composite grating on the substrate under an angle of incidence such that the second illumination beam propagates along a direction that has a component along a second horizontal direction along the surface of the substrate wherein the second horizontal direction is opposite to the first horizontal direction, the substrate being in the substrate position;

an image detector configured to receive, at an image plane, a diffracted beam from the composite grating;

a plurality of lenses arranged along an optical path between the substrate position and the image detector; and

an aperture stop.

17. The lithographic apparatus according to claim 16, further comprising:

an illumination system configured to condition a beam of radiation;

a patterning device support configured to hold a patterning device, the patterning device configured to pattern the beam of radiation to form a patterned beam of radiation;

a substrate table configured to hold the substrate; and

a projection system configured to project the patterned beam of radiation onto the substrate.

18. The lithographic apparatus according to claim 16, wherein the image detector is configured to detect an image of the composite grating using only first order diffraction beams by a pattern recognition method.

19. The lithographic apparatus according to claim 18, wherein the aperture stop of the detection system is configured to block beams of diffraction order other than the first diffraction order when forming the first illumination beam, and to block beams of diffraction order other than a negative first diffraction order when forming the second illumination beam.

20. The lithographic apparatus according to claim 16, wherein the plurality of lenses comprises at least an objective lens adjacent to the surface of the substrate and a projection lens adjacent to the image detector, the aperture stop arranged along the optical path between the objective lens and the projection lens, and wherein the objective lens has a first numerical aperture value and the aperture stop has a second numerical aperture value, the second numerical aperture value being smaller than the first numerical aperture value.

21. The lithographic apparatus according to claim 16, wherein the image detector is configured to detect an image of the composite grating using only a zero order diffraction beam by a pattern recognition method.