Method, program product and apparatus for performing a model based coloring process for geometry decomposition for use in a multiple exposure process
First Claim
Patent Images
1. A method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process, said method comprising the steps of:
- (a) dividing a plurality of said features into a plurality of segments;
(b) determining the image log slope (ILS) value for each of said plurality of segments;
(c) determining the value of the gradient of the image log slope (ILS) value for each of said plurality of segments; and
(d) assigning a phase or color to said segments based on the values of the gradient of the image log slope of each of said plurality of segments.
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Abstract
A method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process. The method includes
- the steps of: (a) dividing a plurality of the features into a plurality of segments; (b) determining the image log slope (ILS) value for each of the plurality of segments; (c) determining the value of the gradient of the image log slope (ILS) value for each of the plurality of segments; and (d) assigning a phase or color to the segments based on the values of the gradient of the image log slope of each of the plurality of segments.
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Citations
20 Claims
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1. A method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process, said method comprising the steps of:
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(a) dividing a plurality of said features into a plurality of segments; (b) determining the image log slope (ILS) value for each of said plurality of segments; (c) determining the value of the gradient of the image log slope (ILS) value for each of said plurality of segments; and (d) assigning a phase or color to said segments based on the values of the gradient of the image log slope of each of said plurality of segments. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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identifying a target pattern for a multi-exposure process; segmenting the target pattern into a plurality of segments; calculating a model-based image value for each of the plurality of segments; and assigning the segments to respective exposures in the multi-exposure process using the calculated model-based image value. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A non-transitory computer readable storage medium comprising instructions, which when executed by a computer, cause the computer to perform a method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process, said method comprising the steps of:
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(a) dividing a plurality of said features into a plurality of segments; (b) determining the image log slope (ILS) value for each of said plurality of segments; (c) determining the value of the gradient of the image log slope (ILS) value for each of said plurality of segments; and (d) assigning a phase or color to said segments based on the values of the gradient of the image log slope of each of said plurality of segments.
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Specification