Device to reduce shadowing during radiative heating of a substrate

• US 8,344,300 B2
• Filed: 06/14/2010
• Issued: 01/01/2013
• Est. Priority Date: 06/14/2010
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Nasman, Ronald
• Primary Examiner(s): Nhu, David
• Application Number:
  US12/815,261
• Publication Number:
  US 20110303654A1
• Time in Patent Office: 932 Days
• Field of Search: 219/118, 219/618, 219/600, 219/627, 219/634, 219/678, 219/686, 438/680, 438/746
• US Class Current: 219/678
• CPC Class Codes: H05B 3/0033 Heating devices using lamps

Abstract

A substrate heating apparatus configured to be coupled to a processing system and radiatively heat a substrate is described. The substrate heating apparatus includes a radiative heat source coupled to a processing system and configured to produce electromagnetic (EM) radiation, a translucent object positioned between the radiative heat source and the substrate along a the EM radiation path, and an opaque object also positioned between the radiative heat source and the substrate along the EM radiation path. The translucent object includes at least one textured surface to cause random refraction of the EM radiation passing through the translucent object, or an optical waveguide configured to encapsulate the opaque object and direct the EM radiation around the opaque object, or both, to prevent creation of a shadow of the opaque object on the substrate.

Claims

1. A substrate heating apparatus, comprising:

a radiative heat source coupled to a processing system and configured to produce electromagnetic (EM) radiation for heating a substrate disposed in said processing system;

a translucent object disposed between said radiative heat source and said substrate along an EM wave path there between; and

an opaque object disposed between said radiative heat source and said substrate along said EM wave path there between, wherein;

said translucent object comprises at least one textured surface to cause random refraction of said EM radiation passing through said translucent object, or

said translucent object comprises an optical waveguide configured to encapsulate said opaque object and direct said EM radiation around said opaque object, or

a combination thereof.

2. The substrate heating apparatus of claim 1, wherein said opaque object comprises a temperature measurement device.

3. The substrate heating apparatus of claim 2, wherein said temperature measurement device comprises a thermocouple or an optical temperature probe.

4. The substrate heating apparatus of claim 1, further comprising:

an optical window, separate from said translucent object, disposed between said radiative heat source and said substrate along said EM wave path there between, and configured to provide a vacuum seal with said processing system.

5. The substrate heating apparatus of claim 1, wherein said translucent object is disposed between said substrate and said opaque object.

6. The substrate heating apparatus of claim 1, wherein said textured surface comprises random roughness, or patterned roughness, or a combination thereof.

7. The substrate heating apparatus of claim 1, wherein said textured surface is characterized by a roughness ranging from 0.5 micron to 10000 microns.

8. The substrate heating apparatus of claim 1, wherein said textured surface is characterized by a roughness ranging from 0.5 micron to 100 microns.

9. The substrate heating apparatus of claim 1, wherein said textured surface is characterized by a roughness ranging from 0.5 micron to 10 microns.

10. The substrate heating apparatus of claim 1, wherein said optical waveguide comprises:

a first translucent member having a first concave surface; and

a second translucent member having a second concave surface,

said first translucent member configured to mate with said second translucent member such that said first concave surface faces said second concave surface and defines a void there between to receive said opaque object.

11. The substrate heating apparatus of claim 10, wherein said optical waveguide is configured to insert within said translucent object and provide a reflective interface between an outer surface of said optical waveguide and said translucent object.

12. The substrate heating apparatus of claim 1, further comprising:

a susceptor having a support surface to support said substrate.

13. The substrate heating apparatus of claim 12, wherein said susceptor is disposed between said substrate and said EM radiation source.

14. The substrate heating apparatus of claim 12, wherein said susceptor is composed of an oxide, a nitride, a carbide, or any combination of two or more thereof.

15. The substrate heating apparatus of claim 12, further comprising:

a lifting assembly comprising three or more lift pins configured to vertically translate said substrate to and from said support surface of said substrate support, said three or more lift pins extend through openings in said substrate support and contact a bottom surface of said substrate when elevating and lowering said substrate.

16. The substrate heating apparatus of claim 12, further comprising:

a lifting assembly comprising three or more lifting elements configured to vertically translate said substrate to and from said support surface of said susceptor,

wherein each of said three or more lifting elements extends laterally into a recess positioned below a peripheral edge of said substrate in said susceptor, and

wherein each of said three or more lifting elements comprises a lifting support surface configured to contact a bottom surface of said substrate when lifting said substrate.

17. The substrate heating apparatus of claim 1, wherein said radiative heat source comprises a lamp array that is configured to rotate.

18. The substrate heating apparatus of claim 1, wherein said material processing system comprises an etching system, a deposition system, or a thermal treatment system.

19. A processing system, comprising:

a process chamber;

a susceptor coupled to said process chamber and configured to support a substrate;

a substrate heating apparatus coupled to said processing system and configured to radiatively heat said substrate, comprising;

a radiative heat source configured to produce electromagnetic (EM) radiation;

a translucent object disposed between said radiative heat source and said substrate along an EM wave path there between; and

an opaque object disposed between said radiative heat source and said substrate along said EM wave path there between, wherein;

said translucent object comprises at least one textured surface to cause random refraction of said EM radiation passing through said translucent object, or

said translucent object comprises an optical waveguide configured to encapsulate said opaque object and direct said EM radiation around said opaque object, or

a combination thereof; and

a gas distribution system configured to introduce a process gas to said process chamber to facilitate film forming reactions at a surface of said substrate.

20. The processing system of claim 19, wherein said radiative heat source comprises a lamp array that is configured to rotate.