Inspection apparatus and inspection method using electromagnetic wave
First Claim
1. An apparatus for acquiring information on a time wave form of a terahertz wave, comprising:
- a generating unit for generating a terahertz wave;
a detecting unit for detecting waveform information of a terahertz wave generated by the generating unit;
a distance changing unit for changing a first position in the generating unit into a third position therein or a second position in the detecting unit into a fourth position to change a propagating distance of the terahertz wave from the first position to the second position; and
a control unit for controlling the distance changing unit so that first waveform information of the terahertz wave generated at the first position is detected and subsequently, second waveform information of the terahertz wave generated at the third position is detected at the second position or second waveform information of the terahertz wave generated at the first position is detected at the fourth position,wherein information on the time waveform of the terahertz wave is acquired by using the first and second waveform information detected in the detecting unit.
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Abstract
An apparatus for acquiring information on a time waveform of a terahertz wave is comprised of a terahertz wave-generating unit, a waveform information-detecting unit, and a delay unit for changing the time after the terahertz wave is generated in the generating unit until it is detected as waveform information of the terahertz wave in the detecting unit, wherein the delay unit is configured so as to change a propagating distance of the terahertz wave generated by the generating unit, and associates waveform information of the terahertz wave, which is detected in the detecting unit, and the propagating distance every terahertz wave generated by the generating unit.
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Citations
11 Claims
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1. An apparatus for acquiring information on a time wave form of a terahertz wave, comprising:
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a generating unit for generating a terahertz wave; a detecting unit for detecting waveform information of a terahertz wave generated by the generating unit; a distance changing unit for changing a first position in the generating unit into a third position therein or a second position in the detecting unit into a fourth position to change a propagating distance of the terahertz wave from the first position to the second position; and a control unit for controlling the distance changing unit so that first waveform information of the terahertz wave generated at the first position is detected and subsequently, second waveform information of the terahertz wave generated at the third position is detected at the second position or second waveform information of the terahertz wave generated at the first position is detected at the fourth position, wherein information on the time waveform of the terahertz wave is acquired by using the first and second waveform information detected in the detecting unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for acquiring information on a time waveform of a terahertz wave comprising the steps of:
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generating a terahertz wave at a first position in a generating unit; detecting first waveform information of the terahertz wave at a second position in a detecting unit; changing the first position into a third position in the generating unit or changing the second position into a fourth position in the detecting unit to change a propagating distance of the terahertz wave from the first position to the second position; detecting second waveform information of the generated terahertz wave after the change from the first position into the third position or from the second position into the fourth position; and acquiring information on a time waveform of the terahertz wave using the first and second waveform information.
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11. A terahertz time domain spectroscopy method comprising the steps of generating a terahertz wave, propagating the generated terahertz wave, detecting information on the propagated terahertz wave, and configuring a time waveform of the terahertz wave from information on the detected terahertz wave, wherein a position generating or detecting the terahertz wave is changed in order to obtain the time waveform.
Specification