Display device and manufacturing method of the same
First Claim
Patent Images
1. A display device comprising:
- a semiconductor film;
a gate wire;
a gate insulating film interposed between the semiconductor film and the gate wire; and
a source or drain wire electrically connected to the semiconductor film,wherein the gate wire comprises;
a first conductive film;
a second conductive film over the first conductive film so that a width of the second conductive film is smaller than a width of the first conductive film; and
a third conductive film over the first conductive film so as to cover a top surface and a side surface of the second conductive film, andwherein the source or drain wire comprises;
a fourth conductive film;
a fifth conductive film over the fourth conductive film so that a width of the fifth conductive film is smaller than a width of the fourth conductive film; and
a sixth conductive film over the fourth conductive film so as to cover a top surface and a side surface of the fifth conductive film.
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Abstract
A plurality of wires and electrodes are formed by forming a first conductive film, selectively forming a resist over the first conductive film, forming a second conductive film over the first conductive film and the resist, removing the second conductive film formed over the resist by removing the resist, forming a third conductive film so as to cover the second conductive film formed over the first conductive film, and selectively etching the first conductive film and the third conductive film. Thus, wires using a low resistance material can be formed in a large-sized panel, and thus, a problem of signal delay can be solved.
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Citations
24 Claims
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1. A display device comprising:
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a semiconductor film; a gate wire; a gate insulating film interposed between the semiconductor film and the gate wire; and a source or drain wire electrically connected to the semiconductor film, wherein the gate wire comprises; a first conductive film; a second conductive film over the first conductive film so that a width of the second conductive film is smaller than a width of the first conductive film; and a third conductive film over the first conductive film so as to cover a top surface and a side surface of the second conductive film, and wherein the source or drain wire comprises; a fourth conductive film; a fifth conductive film over the fourth conductive film so that a width of the fifth conductive film is smaller than a width of the fourth conductive film; and a sixth conductive film over the fourth conductive film so as to cover a top surface and a side surface of the fifth conductive film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A display device comprising:
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a gate wire; a gate insulating film formed over the gate wire; a first semiconductor film formed over the gate insulating film; a second semiconductor film doped with an impurity element which is formed over the first semiconductor film; and a source or drain wire which is electrically connected to the second semiconductor film, wherein the gate wire comprises; a first conductive film; a second conductive film over the first conductive film so that a width of the second conductive film is smaller than a width of the first conductive film; and a third conductive film over the first conductive film so as to cover a top surface and a side surface of the second conductive film, and wherein the source or drain wire comprises; a fourth conductive film; a fifth conductive film over the fourth conductive film so that a width of the fifth conductive film is smaller than a width of the fourth conductive film; and a sixth conductive film over the fourth conductive film so as to cover a top surface and a side surface of the fifth conductive film. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A display device comprising:
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a semiconductor film; a gate wire; a gate insulating film interposed between the semiconductor film and the gate wire; and a source or drain wire electrically connected to the semiconductor film, wherein the source or drain wire comprises; a first conductive film; a second conductive film over the first conductive film so that a width of the second conductive film is smaller than a width of the first conductive film; and a third conductive film over the first conductive film so as to cover a top surface and a side surface of the second conductive film. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification
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Current AssigneeSemiconductor Energy Laboratory Co., Ltd.
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Original AssigneeSemiconductor Energy Laboratory Co., Ltd.
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InventorsFujikawa, Saishi, Hosoya, Kunio
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Primary Examiner(s)Monbleau, Davienne
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Assistant Examiner(s)AHMED, SELIM U
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Application NumberUS12/565,854Publication NumberTime in Patent Office1,195 DaysField of Search257/59, 257/72, 257/99, 257/E33.066US Class Current257/59CPC Class CodesH01L 27/124 with a particular compositi...H01L 27/1288 employing particular maskin...H01L 29/4908 for thin film semiconductor...H10K 10/481 characterised by the gate c...H10K 59/1315 comprising structures speci...H10K 71/00 Manufacture or treatment sp...H10K 71/166 using selective deposition,...H10K 71/231 by etching of existing layersH10K 71/621 Providing a shape to conduc...
