Methods and devices for driving micromirrors

• US 8,345,224 B2
• Filed: 03/02/2011
• Issued: 01/01/2013
• Est. Priority Date: 10/08/2008
• Status: Active Grant

• Current Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Inventors: Horn, Jan, Kempter, Christian
• Primary Examiner(s): Ton, Toan
• Assistant Examiner(s): RIDDLE, CHRISTINA A
• Application Number:
  US13/038,734
• Publication Number:
  US 20110188017A1
• Time in Patent Office: 671 Days
• Field of Search: 355/52, 355/53, 355/55, 355 67- 71, 355/77, 359/223.1, 359290-291, 359/295, 359/849, 359/850, 359/853, 359/855, 359/865, 250/492.1, 250/492.2, 250/492.22, 250/548
• US Class Current: 355/67
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 27/0043 in projection exposure systems, e.g. microlithographic systems
• CPC Class Codes: G03B 27/72 Controlling or varying light intensity, spectral composition, or exposure time in photographic printing apparatus
• CPC Class Codes: G03F 7/70075 Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
• CPC Class Codes: G03F 7/70116 Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets
• CPC Class Codes: G03F 7/702 Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
• CPC Class Codes: G03F 7/70525 Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure

Abstract

A micromirror of a micromirror array in an illumination system of a microlithographic projection exposure apparatus can be tilted through a respective tilt angle about two tilt axes. The micromirror is assigned three actuators which can respectively be driven by control signals in order to tilt the micromirror about the two tilt axes. Two control variables are specified, each of which is assigned to one tilt axis and which are both assigned to unperturbed tilt angles. For any desired combinations of the two control variables, as a function of the two control variables, one of the three actuators is selected and its control signal is set to a constant value, in particular zero. The control signals are determined so that, when the control signals are applied to the other two actuators, the micromirror adopts the unperturbed tilt angles as a function of the two control variables.

Claims

1. A method, comprising:

a) providing a micromirror array in an illumination system of a microlithographic projection exposure apparatus, the micromirror array comprising a micromirror which is tiltable through a respective tilt angle about two tilt axes, the micromirror being assigned three actuators, each of the three actuators being capable of being driven by control signals to tilt the micromirror about the two tilt axes;

b) specifying two control variables, each of the two control variables being assigned to one tilt axis, and both of the two control variables being assigned to unperturbed tilt angles;

c) for any desired combinations of the two control variables, as a function of the two control variables, selecting one of the three actuators whose control signal is set to a constant value;

d) determining the control signals so that, when the control signals are applied to the other two actuators, the micromirror adopts the unperturbed tilt angles as a function of the two control variables; and

e) applying the control signals to the actuators.

2. The method according to claim 1, wherein the control variables are assigned linearly to the unperturbed tilt angles.

3. The method according to claim 1, comprising selecting the actuator whose control signal is set to a constant value by:

assigning a two-dimensional control variable vector with a direction to the two control variables, which are assigned to the unperturbed tilt angles about the two tilt axes;

assigning an effective tilt vector to each individual actuator; and

then

selecting the actuator whose effective tilt vector has a direction which is not immediately adjacent to the direction of the control variable vector.

4. The method according to claim 3, comprising obtaining the effective tilt vector of an actuator from the control variables that are assigned to the unperturbed tilt angles which the micromirror adopts when only this actuator is driven.

5. The method according to claim 3, comprising determining the effective tilt vectors by measurement.

6. The method according to claim 3, comprising determining the directions of the control variable vector and the effective tilt vectors according to

7. The method according to claim 6, wherein:

the effective tilt vector of a first actuator of the three actuators has a direction which coincides with the first direction to within an alignment angle;

the effective tilt vector of a second actuator of the three actuators essentially makes an angle of 120°

with the effective tilt vector of the first actuator;

the effective tilt vector of a third actuator of the three actuators essentially makes an angle of 120°

with the effective tilt vector of the second actuator; and

the method comprises;

determining the direction θ

of the control variable vector; and

then selecting the third actuator for θ

ε

[φ

,120°

+φ

], the first actuator for θ

ε

[120°

+φ

,240°

+φ

], and the second actuator for θ

ε

[240°

+φ

,360°

+φ

].

8. The method according to claim 1, wherein the actuators are arranged with threefold symmetry.

9. The method according to claim 1, comprising determining the two control variables from setpoint tilt angles in b) by an algorithm selected from the group consisting of a control algorithm, a regulation algorithm, and a combined control and regulation algorithm.

10. The method according to claim 9, comprising:

specifying target tilt angles; and

determining a trajectory including a sequence of setpoint tilt angles, which represents a transition of actual tilt angles through which the micromirror is instantaneously tilted to the target tilt angles.

11. The method according to claim 9, comprising considering calibration data when determining the setpoint tilt angles.

12. The method according to claim 9, comprising specifying or correcting the two control variables by a regulation algorithm, wherein the regulation algorithm receives a regulation difference which is determined from the setpoint tilt angles and negative feedback of the actual tilt angles through which the micromirror is instantaneously tilted.

13. The method according to claim 9, comprising specifying the two control variables by assigning them to the setpoint tilt angles via an algorithm which uses an inverse system dynamics model.

14. The method according to claim 1, wherein c) and d) comprise determining the control signals for given control variables from an assignment table.

15. The method according to claim 14, comprising:

compiling the assignment table between the two control variables and the three control signals in a parameterisation phase by applying various control signals to the three actuators; and

measuring the tilt angles resulting from compiling the assignment table; and

assigning the two control variables linearly to the resulting tilt angles,

wherein one control signal respectively is kept constant when the control signals are being applied.

16. The method according to claim 1, wherein c) and d) comprise determining the control signals for given control variables via a calculation rule which uses a parameter vector.

17. The method according to claim 16, comprising determining the parameter vector in a parameterisation phase by estimation from at least three assignments between tilt angles and the control signals of the three actuators, wherein the at least 3 assignments are determined by applying various control signals to the three actuators and measuring tilt angles resulting therefrom.

18. The method according to claim 17, comprising estimating the parameter vector by a least-squares estimator.

19. The method according to claim 1, wherein the micromirror can respectively adopt at least 3 different tilt angles about the tilt axes.

20. A method, comprising:

a) providing a micromirror array which is arranged in an illumination system of a microlithographic projection exposure apparatus, the micromirror array comprising a micromirror, the micromirror being tiltable through a respective tilt angle about two tilt axes, and the micromirror being assigned three actuators which are driven by control signals to tilt the micromirror about the two tilt axes;

b) compiling an assignment table between the tilt angles and the control signals of the three actuators by activating and measuring a plurality of tilt angles of the micromirror and storing the control signals applied to the three actuators;

c) specifying two control variables, each of the two control variables being assigned to one tilt axis, and both of the control variables being assigned linearly to the unperturbed tilt angles;

d) determining control signals which cause the micromirror to tilt through the unperturbed tilt angles, by linearly assigning the two control variables to the tilt angles of the assignment table according to the assignment in c) and reading out the control signals assigned to these tilt angles from the assignment table; and

e) applying the control signals to the actuators.

21. A method, comprising:

a) providing a micromirror array which is arranged in an illumination system of a microlithographic projection exposure apparatus, the micromirror array comprising a micromirror, the micromirror being tiltable through a respective tilt angle about two tilt axes, and the micromirror being assigned three actuators which are respectively driven by control signals in order to tilt the micromirror about the two tilt axes;

b) determining at least 3 assignments between tilt angles and the control signals of the three actuators by activating and measuring various tilt angles of the micromirror and the control signals applied to the three actuators;

c) estimating a parameter vector from the assignments obtained in b);

d) specifying two control variables, each of which is assigned to one tilt axis;

e) determining the control signals for given control variables via a calculation rule which uses the estimated parameter vector; and

f) applying the control signals to the actuators.

22. A drive electronics configured to drive a micromirror of a micromirror array, the micromirror array being in an illumination system of a microlithographic projection exposure apparatus, the micromirror having two tilt axes, three actuators being assigned to the micromirror to tilt the micromirror about the two tilt axes, the drive electronics comprising:

a) a converter comprising an input for control variables which are assigned to unperturbed tilt angles about the two tilt axes;

b) two signal amplifiers controllable via the converter; and

c) a switching configured to apply control signals to the three actuators, wherein;

as a function of the control variables applied to the input of the converter, the control signal of one of the three actuators is set to a constant value via the converter and the switching unit; and

the other two control signals are applied to the actuators via the converter, the switching unit and the two signal amplifiers so that the micromirror adopts the unperturbed tilt angles, assigned to the control variables, about the two tilt axes.

23. The drive electronics according to claim 22, wherein:

the input for control variables of the converter is connected to a system configured so that control variables are determined from setpoint tilt angles; and

the system is selected from the group consisting of a control system, a regulation system, and a combined control and regulation system.

24. The drive electronics according to claim 22, wherein the converter comprises a memory for an assignment table, from which the control signals of the three actuators are determined as a function of the control variables applied to the input of the converter.

25. The drive electronics according to claim 22, wherein the converter comprises a calculation unit by which, via a calculation rule which uses a parameter vector, the control signals of the three actuators are calculated as a function of the control variables applied to the input of the converter.

26. A system, comprising:

the drive electronics according to claim 22; and

the illumination system comprising the micromirror array comprising the micromirror.

27. A drive electronics configured to drive a micromirror of a micromirror array, the micromirrror array being in an illumination system of a microlithographic projection exposure apparatus, the micromirror having two tilt axes and the micromirror being assigned three actuators, which are respectively driven by control signals to tilt the micromirror about the two tilt axes, the drive electronics comprising:

a) a converter comprising an input for control variables which are assigned to unperturbed tilt angles about the two tilt axes; and

b) signal amplifiers which are controlled via the converter and are connected directly or indirectly to the actuators so that the control signals are applied to the actuators,

wherein the converter comprises a memory for an assignment table from which control signals of the three actuators are determined as a function of the control variables applied to the input of the converter.

28. A drive electronics configured to drive a micromirror of a micromirror array, the micromirror array being in an illumination system of a microlithographic projection exposure apparatus, the micromirror having two tilt axes and the micromirror being assigned three actuators which are respectively driven by control signals to tilt the micromirror about the two tilt axes, the drive electronics comprising:

a) a converter comprising an input for control variables which are assigned to unperturbed tilt angles about the two tilt axes; and

b) signal amplifiers which are controlled by means of the converter and are connected directly or indirectly to the actuators so that the control signals are applied to the actuators;

wherein the converter comprises a calculation unit by which, via a calculation rule that uses a parameter vector which is estimated in a parameterization phase, the control signals of the three actuators are calculated as a function of the control variables applied to the input of the converter.