Thin-layer porous optical sensors for gases and other fluids
First Claim
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1. A thin layer electrode disposed in a fluid in an atmosphere, the thin layer film comprising:
- a transparent base substrate;
a thin film disposed on the base substrate, the thin film defining a plurality of pores therein; and
a material disposed on the thin film such that the pores are exposed to an atmosphere, the material configured to isolate a portion of the fluid in the pores from the atmosphere when a potential is applied, the material further configured for reflectance of an incident light when the potential is applied to redirect into the pores at least a portion of the incident beam passing through the transparent base substrate into the pores in a direction of the material.
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Abstract
A gas sensor uses optical interferents in a porous thin film cell to measure the refractive index of the pore medium. As the medium within the pores changes, spectral variations can be detected. For example, as the pores are filled with a solution, the characteristic peaks exhibit a spectral shift in one direction. Conversely, when tiny amounts of gas are produced, the peaks shift in the opposite direction. This can be used to measure gas evolution, humidity and for applications for other interferometric-based sensing devices.
160 Citations
13 Claims
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1. A thin layer electrode disposed in a fluid in an atmosphere, the thin layer film comprising:
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a transparent base substrate; a thin film disposed on the base substrate, the thin film defining a plurality of pores therein; and a material disposed on the thin film such that the pores are exposed to an atmosphere, the material configured to isolate a portion of the fluid in the pores from the atmosphere when a potential is applied, the material further configured for reflectance of an incident light when the potential is applied to redirect into the pores at least a portion of the incident beam passing through the transparent base substrate into the pores in a direction of the material. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A thin layer apparatus for fluid analysis, the thin layer apparatus comprising:
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a transparent base substrate; a thin film sputtered on the base substrate, the thin film defining a plurality of pores therein, each of the pores having a diameter of 80 nm to about 100 nm and a depth of 250 nm to about 1000 nm, the pores configured to isolate a portion of a fluid from the atmosphere when immersed therein, and an electrode configured to provide a potential to the thin film, wherein the transparent substrate and the thin film are configured for reflectance of an incident light directed into the pores and passing through the transparent base substrate in a direction of the atmosphere when a potential is provided to the thin film. - View Dependent Claims (8)
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9. A method for analyzing matter comprising the steps of:
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(a) introducing a fluid into an optically reflective thin layer electrode, the electrode including a transparent base substrate with a porous layer formed thereon, and a reflective layer disposed on the porous layer, wherein a quantity of the fluid enters at least a pore in the porous layer; (b) applying a potential to the reflective layer such that a portion of the quantity of fluid that has entered at least a pore is isolated from a remaining bulk of the fluid; (c) directing a light to the optically reflective thin layer electrode; (d) measuring a reflectance from a reflected light from the optically reflective thin electrode; and (e) monitoring a wavelength for which a reflectance forms a peak. - View Dependent Claims (10, 11, 12, 13)
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Specification