Lithographic apparatus and methods for compensating substrate unflatness, determining the effect of patterning device unflatness, and determining the effect of thermal loads on a patterning device

• US 8,345,265 B2
• Filed: 11/11/2009
• Issued: 01/01/2013
• Est. Priority Date: 11/21/2008
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Bijvoet, Dirk-Jan
• Primary Examiner(s): Toatley, Gregory J
• Assistant Examiner(s): ALLI, IYABO
• Application Number:
  US12/616,185
• Publication Number:
  US 20100129741A1
• Time in Patent Office: 1,147 Days
• Field of Search: 355/30, 355 72- 77, 355/66, 355/67, 355 52- 53, 356/399, 356/623, 3562371-2375
• US Class Current: 356/601
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70783 Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7034 Leveling

Abstract

A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate, and a sensor configured to measure a height level, curvature and/or angle of a surface of a patterning device supported on the support.

Claims

1. A lithographic apparatus comprising:

a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam;

a substrate table constructed to hold a substrate;

a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and

a sensor configured to measure a height level, or a curvature, or an angle, or any combination of the foregoing, of a surface of the patterning device supported on the support,

wherein the sensor is configured to determine a curvature of the patterning device in a direction substantially perpendicular to a scanning direction of the lithographic apparatus.

2. The lithographic apparatus of claim 1, wherein the sensor is configured to measure the height level, or the curvature, or the angle, or any combination of the foregoing, of the surface of the patterning device during projection of the patterned radiation beam.

3. The lithographic apparatus of claim 1, wherein the sensor is configured to measure a height level of the patterning device at a plurality of measurement locations, the measurement locations being located in a direction or on a line along which a curvature of the patterning device is to be determined.

4. The lithographic apparatus of claim 3, wherein the sensor comprises a plurality of pairs of transmitter and receiver, each pair being configured to measure a height level of the patterning device at one of the plurality of measurement locations.

5. The lithographic apparatus of claim 3, wherein each transmitter is configured to transmit a measurement beam towards one of the plurality of measurement locations, and wherein each receiver comprises a detector to compare a reflected measurement beam with a reference to determine the height level.

6. The lithographic apparatus of claim 4, wherein each transmitter comprises a projection grating, an image of which being projected on one of the plurality of measurement locations, and each receiver comprises a detection grating, wherein the receiver is configured to compare a reflected projected image of the projection grating with the detection grating to determine the height level of the one of the plurality of measurement locations.

7. The lithographic apparatus of claim 3, wherein the plurality of measurement locations are located close to or in an area on the patterning device where the radiation beam hits the patterning device.

8. The lithographic apparatus of claim 1, wherein the lithographic apparatus comprises:

a patterning device bender configured to bend the patterning device, and

a controller configured to control the patterning device bender on the basis of a difference between a curvature measured by the sensor and a desired curvature of the patterning device.

9. The lithographic apparatus of claim 8, wherein the controller comprises a subtractor to calculate the difference between the measured curvature and the desired curvature of the patterning device.

10. The lithographic apparatus of claim 1, wherein the sensor is configured to determine a height map of the surface of the patterning device.

11. A method for compensating substrate unflatness in a lithographic process, the lithographic process including forming a patterned radiation beam using a patterning device which is configured to impart a radiation beam with a pattern in its cross-section, and projecting the patterned beam of radiation onto the substrate, the method comprising:

measuring the substrate unflatness;

determining a desired curvature for the patterning device to compensate for the substrate unflatness;

measuring a curvature of the patterning device;

comparing the measured curvature and the desired curvature; and

controlling a patterning device bender configured to bend the patterning device based on the comparing to compensate the substrate unflatness.

12. A method for determining the effect of patterning device unflatness in a lithographic process, the lithographic process including forming a patterned radiation beam using a patterning device which is configured to impart a radiation beam with a pattern in its cross-section, and projecting the patterned beam of radiation onto the substrate, the method comprising:

measuring a patterning device unflatness during the lithographic process;

determining an imaging error in the lithographic process; and

analyzing a relationship between the imaging error and the patterning device unflatness.

13. The method of claim 12, wherein the imaging error is a focal error.

14. A method comprising:

determining the effect of thermal loads on a patterning device during a lithographic process, the determining including measuring a patterning device unflatness during the lithographic process, the lithographic process including forming a patterned radiation beam using the patterning device which is configured to impart a radiation beam with a pattern in its cross-section, and projecting the patterned beam of radiation onto the substrate; and

determining a change of the patterning device unflatness in the course of time.

15. The method of claim 14, wherein the change in the patterning device unflatness is used as input for corrective actions.