Anti-static part and its manufacturing method
First Claim
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1. A method of manufacturing an electrostatic discharge (ESD) protector, the method comprising:
- forming a conductive layer mainly made of gold on an upper surface of an insulating substrate;
forming a plurality of electrodes facing each other via a gap by forming the gap in the conductive layer;
forming an overvoltage protective layer covering the gap and a portion of each of the electrodes;
forming an intermediate layer covering the overvoltage protective layer; and
forming a protective resin layer completely covering the intermediate layer and the overvoltage protective layer,wherein the protective resin layer has a physical breaking strength higher than a physical breaking strength of the intermediate layer, andwherein the intermediate layer comprises silicone-resin-based insulating resin and insulating powder made of Al2O3, SiO2, MgO, a composite oxide of Al2O3, a composite oxide of SiO2, or a composite oxide of MgO.
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Abstract
A conductive layer mainly made of gold is formed on an upper surface of an insulating substrate. Plural electrodes facing each other via a gap is formed by forming the gap in the conductive layer. An overvoltage protective layer covering the gap and a portion of each of the plurality of electrodes is formed. This method can provide the gap with a narrow width precisely, and thereby, provide an electrostatic (ESD) protector with a low peak voltage, stable characteristics of suppressing electrostatic discharge, and a high resistance to sulfidation.
16 Citations
17 Claims
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1. A method of manufacturing an electrostatic discharge (ESD) protector, the method comprising:
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forming a conductive layer mainly made of gold on an upper surface of an insulating substrate; forming a plurality of electrodes facing each other via a gap by forming the gap in the conductive layer; forming an overvoltage protective layer covering the gap and a portion of each of the electrodes; forming an intermediate layer covering the overvoltage protective layer; and forming a protective resin layer completely covering the intermediate layer and the overvoltage protective layer, wherein the protective resin layer has a physical breaking strength higher than a physical breaking strength of the intermediate layer, and wherein the intermediate layer comprises silicone-resin-based insulating resin and insulating powder made of Al2O3, SiO2, MgO, a composite oxide of Al2O3, a composite oxide of SiO2, or a composite oxide of MgO. - View Dependent Claims (2, 3, 4, 5, 15)
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6. A method of manufacturing an electrostatic discharge (ESD) protector, the method comprising:
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defining a first dividing line and a plurality of second dividing lines crossing in an upper surface of an insulating substrate, the plurality of second dividing lines crossing the first dividing line; forming a conductive layer mainly made of gold on the upper surface of the insulating substrate; forming a plurality of electrodes facing each other via a gap by forming the gap in the conductive layer; forming a plurality of lower electrodes on a lower surface of the insulating substrate; forming an overvoltage protective layer covering the gap and a portion of each of the electrodes; forming an intermediate layer covering the overvoltage protective layer; forming a protective resin layer completely covering the intermediate layer and the overvoltage protective layer; providing an insulating substrate strip by dividing the insulating substrate along the first dividing line; and providing an insulating substrate piece by dividing the insulating substrate strip along the plurality of second dividing lines, wherein said forming the conductive layer comprises forming the conductive layer on the upper surface of the insulating substrate so that the conductive layer crosses the first dividing line, wherein each of the lower electrodes includes a first portion which crosses the plurality of second dividing lines, and a second portion connected to the first portion, the second portion crossing the first dividing line, the second portion having a width narrower than a width of the first portion, the second portion being disposed away from the plurality of second dividing lines, and wherein the protective resin layer has a physical breaking strength higher than a physical breaking strength of the intermediate layer, and wherein the intermediate layer comprises silicone-resin-based insulating resin and insulating powder made of Al2O3, SiO2, MgO, a composite oxide of Al2O3, a composite oxide of SiO2, or a composite oxide of MgO. - View Dependent Claims (7, 8, 9, 10, 11)
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12. An electrostatic discharge (ESD) protector, comprising:
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an insulating substrate having a surface, the insulating substrate having a rectangular shape having a first long side, a second long side, a first short side, and a second short side; a first electrode provided on the surface of the insulating substrate and extending along the first long side; a second electrode provided on the surface of the insulating substrate and extending along the second long side, the second electrode facing the first electrode via a gap; an overvoltage protective layer covering a portion of the first electrode, a portion of the second electrode, and the gap; an intermediate layer covering the overvoltage protective layer; and a protective resin layer having a thickness equal to or larger than 20 μ
m, the protective resin layer completely covering the overvoltage protective layer and the intermediate layer,wherein the protective resin layer has a physical breaking strength higher than a physical breaking strength of the intermediate layer, and wherein the intermediate layer comprises silicone-resin-based insulating resin and insulating powder made of Al2O3, SiO2, MgO, a composite oxide of Al2O3, a composite oxide of SiO2, or a composite oxide of MgO. - View Dependent Claims (13, 14)
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16. A method of manufacturing an electrostatic discharge (ESD) protector, the method comprising:
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forming a conductive layer mainly made of gold on an upper surface of an insulating substrate; forming first and second electrodes facing each other via a gap by forming the gap in the conductive layer; forming an overvoltage protective layer covering the gap and a portion of each of the first and second electrodes; forming first and second upper electrodes on portions of upper surfaces of the first and second electrodes, respectively; forming an intermediate layer covering the overvoltage protective laver; forming a protective resin layer completely covering the overvoltage protective layer, the protective resin layer extending partially onto the upper surfaces of the first and second upper electrodes; forming a first terminal electrode on the first electrode and on a portion of the first upper electrode; and forming a second terminal electrode on the second electrode and on a portion of the second upper electrode, wherein the protective resin layer has a physical breaking strength higher than a physical breaking strength of the intermediate layer, and wherein the intermediate layer comprises silicone-resin-based insulating resin and insulating powder made of Al2O3, SiO2, MgO, a composite oxide of Al2O3, a composite oxide of SiO2, or a composite oxide of MgO. - View Dependent Claims (17)
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Specification