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Stacked transducing devices

  • US 8,345,513 B2
  • Filed: 12/03/2008
  • Issued: 01/01/2013
  • Est. Priority Date: 12/03/2007
  • Status: Active Grant
First Claim
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1. A probe comprising:

  • a first capacitive micromachined ultrasonic transducer (CMUT) mounted on the probe; and

    a second CMUT contiguous with the first CMUT in a stacked relationship, the second CMUT including a plate, wherein the plate is rigid relative to a first frequency of acoustic energy and flexible relative to a second frequency of acoustic energy.

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