Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield
First Claim
1. A method for manufacturing a magnetic write head, comprising:
- depositing a magnetic write pole material;
forming a write pole defining mask structure over the magnetic write pole material;
performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole;
depositing a non-magnetic side gap material;
forming a side shield defining mask having an opening configured to define a side shield;
depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields;
removing the side shield defining mask;
depositing a non-magnetic fill layer;
performing a chemical mechanical polishing;
performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole;
forming a tapered trailing edge surface on the write pole;
depositing a non-magnetic trailing gap layer; and
forming a trailing shield over the non-magnetic trailing gap layer.
5 Assignments
0 Petitions
Accused Products
Abstract
A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.
-
Citations
22 Claims
-
1. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer. - View Dependent Claims (3, 8, 9, 11, 12, 13, 14)
-
-
2. A method for manufacturing a magnetic write head, comprising:
-
depositing a non-magnetic layer, and forming a tapered surface on the non-magnetic material after depositing the non-magnetic layer, and forming a tapered surface on the non-magnetic material, depositing a magnetic write pole material, at least a portion of the magnetic write pole material being deposited over the tapered surface of the non-magnetic material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer.
-
-
4. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer; wherein the forming a tapered trailing edge surface on the write pole further comprises, after performing the chemical mechanical polishing; depositing a step layer; forming a taper mask over the step layer; performing an ion milling to remove a portion of the step layer and magnetic write pole material to form the tapered surface on the trailing edge of the magnetic write pole material; and wherein the step layer comprises a magnetic material which serves as portion of the write pole. - View Dependent Claims (20)
-
-
5. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer; wherein the forming a tapered trailing edge surface on the mite pole further comprises, after performing the chemical mechanical polishing; depositing a step layer; forming a taper mask over the step layer; performing an ion milling to remove a portion of the step layer and magnetic write pole material to form the tapered surface on the trailing edge of the magnetic write pole material; and wherein the step layer comprises a non-magnetic material and serves to increase magnetic spacing between the trailing shield and the write pole in a region removed from an air bearing surface.
-
-
6. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing nap layer; and forming a trailing shield over the non-magnetic trailing gap layer; wherein the forming a tapered trailing edge surface on the write pole further comprises, after performing the chemical mechanical polishing; depositing a step layer; forming a taper mask over the step layer; performing an ion milling to remove a portion of the step layer and magnetic write pole material to form the tapered surface on the trailing edge of the magnetic write pole material; and further comprising, after performing an ion milling to remove a portion of the step layer and write pole material, depositing a non-magnetic bump material, and performing a second ion milling to remove a portion of the non-magnetic bump material, leaving a non-magnetic bump feature. - View Dependent Claims (7)
-
-
10. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer; and wherein the opening in the side shield defining mask has a depth measured from an air bearing surface plane that defines a throat height of a side shield; and
wherein the trailing magnetic shield has a throat height that is different from the throat height of the side shield.
-
-
15. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer; and further comprising, after depositing the non-magnetic side gap material, and before forming the side shield defining mask; depositing Al2O3; performing a chemical mechanical polishing; and performing a reactive ion etching to remove most of the Al2O3, leaving an Al2O3 side wall formed on first and second side portions of the non-magnetic side gap layer, the Al2O3 side wall having a vertical outer side. - View Dependent Claims (16, 17)
-
-
18. A method for manufacturing a magnetic write head, comprising:
-
depositing a non-magnetic layer comprising Cr, NiCr, Ru or Al2O3, and forming a tapered surface on the non-magnetic material after depositing the non-magnetic layer, and forming a tapered surface on the non-magnetic material, depositing a magnetic write pole material, at least a portion of the magnetic write pole material being deposited over the tapered surface of the non-magnetic material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer.
-
-
19. A method for manufacturing a magnetic write head, comprising:
-
depositing a non-magnetic layer, and forming a tapered surface on the non-magnetic material after depositing the non-magnetic layer, and forming a tapered surface on the non-magnetic material, depositing a magnetic write pole material, at least a portion of the magnetic write pole material being deposited over the tapered surface of the non-magnetic material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer; wherein the tapered surface of the non-magnetic material has an angle of 20 to 40 degrees with respect to a plane of the as deposited magnetic material layer.
-
-
21. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer; wherein the forming a tapered trailing edge surface on the write pole further comprises, after performing the chemical mechanical polishing; depositing a step layer; forming a taper mask over the step layer; performing an ion milling to remove a portion of the step layer and magnetic write pole material to form the tapered surface on the trailing edge of the magnetic write pole material; and wherein the step layer comprises a magnetic material which serves as portion of the write pole; wherein the step layer forms a tapered trailing edge of the write pole, and wherein the step layer and the magnetic write pole material are deposited by sputter deposition or ion beam deposition.
-
-
22. A method for manufacturing a magnetic write head, comprising:
-
depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer; wherein the forming a tapered trailing edge surface on the write pole further comprises, after performing the chemical mechanical polishing; depositing a step layer; forming a taper mask over the step layer; performing an ion milling to remove a portion of the step layer and magnetic write pole material to form the tapered surface on the trailing edge of the magnetic write pole material; and wherein the step layer comprises a magnetic material which serves as portion of the write pole; and wherein the step layer forms a tapered trailing edge of the write pole, and wherein the step layer and the magnetic write pole material are high magnetic moment magnetic materials.
-
Specification