Extension-mode angular velocity sensor
DCFirst Claim
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1. An angular rate sensor comprising:
- a base;
four substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses move in an extension mode;
wherein in the extension mode the four substantially planar masses move in the plane simultaneously away or simultaneously towards a point; and
a X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
a Z-axis capacitive sensor including a moveable electrode attached to the at least one of the four substantially planar masses and a fixed electrode substantially parallel to the moveable electrode and in the plane;
wherein the X-axis capacitive sensor, Y-axis capacitive sensor, and Z-axis capacitive sensor sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.
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Abstract
An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.
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Citations
24 Claims
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1. An angular rate sensor comprising:
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a base; four substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses move in an extension mode;
wherein in the extension mode the four substantially planar masses move in the plane simultaneously away or simultaneously towards a point; anda X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
a Z-axis capacitive sensor including a moveable electrode attached to the at least one of the four substantially planar masses and a fixed electrode substantially parallel to the moveable electrode and in the plane;
wherein the X-axis capacitive sensor, Y-axis capacitive sensor, and Z-axis capacitive sensor sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An angular rate sensor comprising:
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a base; four substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses move in an extension mode;
wherein in the extension mode the four substantially planar masses move in the plane simultaneously away or simultaneously towards a center of mass of the four substantially planar masses;
wherein the center of mass of the four substantially planar masses does not substantially move when the four substantially planar masses are moving in an extension mode;a X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;
a Z-axis capacitive sensor including a moveable electrode attached to the at least one of the four substantially planar masses and a fixed electrode substantially parallel to the moveable electrode and in the plane;at least one electrostatic actuator that drives the four substantially planar masses in an extension mode; four linkages which couple the four masses such that each mass is flexibly coupled to two of the other masses via two of the four linkages;
wherein the four linkages causes the four masses to move in the extension mode; anda frame parallel to the plane and flexibly coupled to the four substantially planar masses, the four substantially planar masses surrounding an outside of the frame within the plane;
wherein at least one of the four substantially planar masses is flexibly coupled to the base through an associated anchoring linkage;
wherein the associated anchoring linkage further comprises an actuator mass suspended to the base via an anchoring flexure; and
a coupling flexure flexibly coupling the at least one of the four substantially planar masses to the actuator mass;
wherein the at least one electrostatic actuator includes an electrode coupled to the actuator mass and an electrode fixed to the base;
wherein the anchoring flexure is substantially compliant to motion in the extension mode;
wherein the coupling flexure is substantially stiff to translation in the extension mode. - View Dependent Claims (21, 22, 23)
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24. A method for utilizing an angular rate sensor comprising:
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moving four substantially planar masses disposed substantially in a plane parallel to in an extension mode;
wherein in the extension mode the four substantially planar masses move in the plane simultaneously away or simultaneously towards a point;providing a X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses; providing a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses; and providing a Z-axis capacitive sensor including a moveable electrode attached to the at least one of the four substantially planar masses and a fixed electrode substantially parallel to the moveable electrode and in the plane;
wherein the X-axis capacitive sensor, Y-axis capacitive sensor, and Z-axis capacitive sensor sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.
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Specification