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Extension-mode angular velocity sensor

DC
  • US 8,347,717 B2
  • Filed: 08/01/2012
  • Issued: 01/08/2013
  • Est. Priority Date: 09/11/2009
  • Status: Active Grant
First Claim
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1. An angular rate sensor comprising:

  • a base;

    four substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses move in an extension mode;

    wherein in the extension mode the four substantially planar masses move in the plane simultaneously away or simultaneously towards a point; and

    a X-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;

    a Y-axis capacitive sensor including an electrode formed on the base and a portion of at least one of the four substantially planar masses;

    a Z-axis capacitive sensor including a moveable electrode attached to the at least one of the four substantially planar masses and a fixed electrode substantially parallel to the moveable electrode and in the plane;

    wherein the X-axis capacitive sensor, Y-axis capacitive sensor, and Z-axis capacitive sensor sense angular velocity of the angular rate sensor about three different input axes of the angular rate sensor.

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