Scribe line forming device and scribe line forming method
First Claim
1. A scribe line forming apparatus comprising:
- a vertical crack forming member that has a blade at a tip thereof and is used for forming a vertical crack to be an origination point of a scribe line by pressing the blade against a surface of a brittle substrate with pressure;
an impact force applying means for applying an abrupt impact force to the vertical crack forming member in order to generate the vertical crack having a predetermined depth at a desired position in the brittle substrate;
a heating means for forming an area having a temperature lower than a softening point of the brittle substrate;
a cooling means for cooling the brittle substrate;
an arrangement movement means for arranging the heating means, the vertical crack forming member, the impact force applying means, and the cooling means to be positioned so as to move relative to the brittle substrate at predetermined intervals along a planned scribe line that is prearranged on the surface of the brittle substrate; and
a control unit that controls driving of the impact force applying means.
1 Assignment
0 Petitions
Accused Products
Abstract
A vertical crack is generated at a desired position on a brittle material substrate S by making a wheel tip 5a of a glass cutter 5 move while being in contact with the substrate surface by a load which does not allow the wheel tip 5a to damage the surface, using an armature 6 applying an abrupt impact force for generating the vertical crack having a predetermined depth, to the glass cutter 5 moving on the substrate. A scribe line is formed as the vertical crack is urged to extend along a planned scribe line, due to a stress gradient exerted onto the vertical crack and occurring between a compressive stress in an irradiation area on the substrate at which a laser beam is irradiated from a laser beam oscillator 8 and a tensile stress in a cooling area made by a cooling medium released from a cooling nozzle 7.
13 Citations
18 Claims
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1. A scribe line forming apparatus comprising:
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a vertical crack forming member that has a blade at a tip thereof and is used for forming a vertical crack to be an origination point of a scribe line by pressing the blade against a surface of a brittle substrate with pressure; an impact force applying means for applying an abrupt impact force to the vertical crack forming member in order to generate the vertical crack having a predetermined depth at a desired position in the brittle substrate; a heating means for forming an area having a temperature lower than a softening point of the brittle substrate; a cooling means for cooling the brittle substrate; an arrangement movement means for arranging the heating means, the vertical crack forming member, the impact force applying means, and the cooling means to be positioned so as to move relative to the brittle substrate at predetermined intervals along a planned scribe line that is prearranged on the surface of the brittle substrate; and a control unit that controls driving of the impact force applying means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A scribe line forming method comprising the steps of:
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while making a vertical crack forming member having a blade at a tip thereof move on a brittle substrate, generating a vertical crack having a predetermined depth at a desired position on a brittle substrate with an impact force applying means that applies an abrupt impact force to the blade; forming a scribe line by forming, with the vertical crack, an irradiation area that has a temperature lower than a softening point of the brittle substrate along a planned scribe line arranged on the brittle substrate, and forming a cooling area in rear of the irradiation area. - View Dependent Claims (16, 17, 18)
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Specification