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Method to arrange features on a substrate to replicate features having minimal dimensional variability

  • US 8,349,241 B2
  • Filed: 10/04/2002
  • Issued: 01/08/2013
  • Est. Priority Date: 10/04/2002
  • Status: Active Grant
First Claim
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1. A method of arranging features, on a substrate having topological variations, to replicate features having minimal dimensional variability, said method comprising:

  • forming a volume of flowable material on a region of said substrate, said region having an area associated therewith;

    forming, from said volume of flowable material, a plurality of features on said region; and

    transferring said plurality of features into said substrate, defining transferred features, with said area of said region being established to maximize a planarity of said region in a first direction to minimize dimensional variations among a subset of said transferred features in a second direction orthogonal to said first direction.

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