Charged particle beam applied apparatus
First Claim
1. A charged particle beam applied apparatus comprising:
- a charged particle source that produces charged particles;
a primary electron optical system that includes an illumination-system separation unit separating the charged particles produced by the charged particle source into a plurality of charged particle beams, one or more lenses used to apply the plurality of charged particle beams onto a specimen, and a scanning-beam deflector causing the plurality of charged particle beams to scan the specimen;
a signal detecting unit that detects individual secondary charged particle beams produced at a plurality of positions on the specimen by illuminating the specimen with the plurality of charged particle beams;
a secondary electron optical system that guides the secondary charged particle beams to the signal detecting unit;
a movable stage on which the specimen is mounted; and
a control unit that controls the switching times of charge-control beam illumination and signal-detection beam illumination, the charge-control beam illumination carried out for negatively charging the specimen by illuminating the specimen with a plurality of charge-control charged particle beams, and the signal-detection beam illumination carried out for detecting signals from the specimen by illuminating the specimen with a plurality of signal-detection charged particle beams,wherein the control unit controls optical conditions of the primary electron optical system to switch between the charge-control beam illumination and the signal-detection beam illumination, andwherein the primary electron optical system further includes a first deflector disposed between the charged particle source and the illumination-system separation unit, and the control unit controls the first deflector to deflect the charged particles so that the charged particles selectively pass through a part of the illumination-system separation unit to form the charge-control charged particle beams or the signal-detection charged particle beams.
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Accused Products
Abstract
Provided is a multi-beam type charged particle beam applied apparatus in an implementable configuration, capable of achieving both high detection accuracy of secondary charged particles and high speed of processing characteristically different specimens. An aperture array (111) includes plural aperture patterns. A deflector (109) for selecting an aperture pattern through which a primary beam passes is disposed at the position of a charged particle source image created between an electron gun (102), i.e., a charged particle source, and the aperture array (111). At the time of charge-control beam illumination and at the time of signal-detection beam illumination, an aperture pattern of the aperture array (111) is selected, and conditions of a lens array (112), surface electric-field control electrode (118) and the like are switched in synchronization with each beam scanning. Thus, the charges are controlled and the signals are detected at different timings under suitable conditions, respectively.
76 Citations
17 Claims
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1. A charged particle beam applied apparatus comprising:
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a charged particle source that produces charged particles; a primary electron optical system that includes an illumination-system separation unit separating the charged particles produced by the charged particle source into a plurality of charged particle beams, one or more lenses used to apply the plurality of charged particle beams onto a specimen, and a scanning-beam deflector causing the plurality of charged particle beams to scan the specimen; a signal detecting unit that detects individual secondary charged particle beams produced at a plurality of positions on the specimen by illuminating the specimen with the plurality of charged particle beams; a secondary electron optical system that guides the secondary charged particle beams to the signal detecting unit; a movable stage on which the specimen is mounted; and a control unit that controls the switching times of charge-control beam illumination and signal-detection beam illumination, the charge-control beam illumination carried out for negatively charging the specimen by illuminating the specimen with a plurality of charge-control charged particle beams, and the signal-detection beam illumination carried out for detecting signals from the specimen by illuminating the specimen with a plurality of signal-detection charged particle beams, wherein the control unit controls optical conditions of the primary electron optical system to switch between the charge-control beam illumination and the signal-detection beam illumination, and wherein the primary electron optical system further includes a first deflector disposed between the charged particle source and the illumination-system separation unit, and the control unit controls the first deflector to deflect the charged particles so that the charged particles selectively pass through a part of the illumination-system separation unit to form the charge-control charged particle beams or the signal-detection charged particle beams. - View Dependent Claims (2, 3, 4, 5)
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6. A charged particle beam applied apparatus comprising:
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a charged particle source that produces charged particles; a primary electron optical system that includes an illumination-system separation unit separating the charged particles produced by the charged particle source into a plurality of charged particle beams, one or more lenses used to apply the plurality of charged particle beams onto a specimen, and a scanning-beam deflector causing the plurality of charged particle beams to scan the specimen; a signal detecting unit that detects individual secondary charged particle beams produced at a plurality of positions on the specimen by illuminating the specimen with the plurality of charged particle beams; a movable stage on which the specimen is mounted; a surface electric-field control unit that controls the surface electric field of the specimen; and a control unit that controls optical conditions of the first electron optical system and the surface electric-field control unit and controls the switching times of charge-control beam illumination and signal-detection beam illumination, the charge-control beam illumination carried out for charging the specimen by illuminating the specimen with a plurality of charge-control charged particle beams, and the signal-detection beam illumination carried out for illuminating the specimen with a plurality of signal-detection charged particle beams, wherein the primary electron optical system further includes a first deflector between the charged particle source and the illumination-system separation unit, and the first deflector deflects the charged particles so as to select a part of the illumination-system separation unit to form the charge-control charged particle beams or the signal-detection charged particle beams. - View Dependent Claims (7, 8, 9, 10, 11)
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12. A charged particle beam applied apparatus comprising:
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a charged particle source that produces charged particles; an illumination-system separation unit that includes a plurality of aperture patterns and separates the charged particles produced by the charged particle source into a plurality of charged particle beams; a primary electron optical system that includes a pattern-selecting deflector disposed between the charged particle source and the illumination-system separation unit, the pattern-selecting deflector applying the charged particles from the charged particle source to one of the plurality of aperture patterns, one or more lenses used to apply the plurality of charged particle beams onto a specimen, and a scanning-beam deflector causing the plurality of charged particle beams to scan the specimen; a signal detecting unit that detects individual secondary charged particle beams produced at a plurality of positions on the specimen by illuminating the specimen with the plurality of charged particle beams; a secondary electron optical system that guides the secondary charged particle beams to the signal detecting unit; a movable stage on which the specimen is mounted; a surface electric-field control unit that controls the surface electric field of the specimen; and a control unit that controls optical conditions of the first electron optical system and the surface electric-field control unit and controls switching between charge-control beam illumination and signal-detection beam illumination, the charge-control beam illumination carried out for charging the specimen with a plurality of charge-control charged particle beams, and the signal-detection beam illumination carried out for detecting signals from the specimen. - View Dependent Claims (13, 14, 15, 16, 17)
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Specification