Semiconductor light emitting device and method for manufacturing same

• US 8,350,283 B2
• Filed: 06/03/2011
• Issued: 01/08/2013
• Est. Priority Date: 06/07/2010
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Nishiuchi, Hideo, Higuchi, Kazuhito, Obata, Susumu, Nakayama, Toshiya
• Primary Examiner(s): Nguyen, Dao H
• Assistant Examiner(s): Nguyen, Tram H
• Application Number:
  US13/152,654
• Publication Number:
  US 20110297983A1
• Time in Patent Office: 585 Days
• Field of Search: 257/13, 257 79-103, 257/918, 257/E31.058, 257/E31.063, 257/E31.115, 257/E25.032, 257/E27.139, 257/E33.023, 257/458, 257/656, 257252-254, 257257-258, 257/E33.046, 257/E29.336, 257/E31.036, 257E31087-E31088, 257E31061-E31062, 438 22- 47, 438/69, 438/493, 438/503, 438/507, 438/956
• US Class Current: 257/98
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2933/0041 relating to wavelength conversion elements
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate
• CPC Class Codes: H01L 33/44 characterised by the coatings, e.g. passivation layer or anti-reflective coating
• CPC Class Codes: H01L 33/505 characterised by the shape, e.g. plate or foil
• CPC Class Codes: H01L 33/58 Optical field-shaping elements
• CPC Class Codes: H01L 33/62 Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
• CPC Class Codes: H01L 33/642 characterized by the shape
• CPC Class Codes: H01L 33/647 the elements conducting electric current to or from the semiconductor body

Abstract

According to one embodiment, a semiconductor light emitting device includes a light emitting unit, first and second conductive members, an insulating layer, a sealing member, and an optical layer. The light emitting unit includes a semiconductor stacked body and first and second electrodes. The semiconductor stacked body includes first and second semiconductor layers and a light emitting layer, and has a major surface on a second semiconductor layer side. The first and second electrodes are connected to the first and second semiconductor layers on the major surface side, respectively. The first conductive member is connected to the first electrode and includes a first columnar portion covering a portion of the second semiconductor. The insulating layer is provided between the first columnar portion and the portion of the second semiconductor. The sealing member covers side surfaces of the conductive members. The optical layer is provided on the other major surface.

Claims

1. A semiconductor light emitting device, comprising:

a light emitting unit including

a semiconductor stacked body including a first

semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer, the semiconductor stacked body having a first major surface on a first semiconductor layer side and a second major surface on a second semiconductor layer side,

a first electrode electrically connected to the first semiconductor layer on a second major surface side, and

a second electrode electrically connected to the second semiconductor layer on the second major surface side;

a first conductive member electrically connected to the first electrode, the first conductive member including a first columnar portion provided on the second major surface to cover a portion of the second semiconductor layer on the second major surface side, the first columnar portion being separate from the second semiconductor layer;

an insulating layer provided between the first columnar portion and the portion of the second semiconductor layer on the second major surface side;

a second conductive member electrically connected to the second electrode, the second conductive member including a second columnar portion provided on the second major surface;

a sealing member covering a side surface of the first conductive member and a side surface of the second conductive member; and

an optical layer provided on the first major surface of the semiconductor stacked body, the optical layer including a wavelength conversion unit configured to absorb an emitted light emitted from the light emitting layer and emit light having a wavelength different from a wavelength of the emitted light;

wherein the first conductive member further includes a first connection portion covering at least a portion of the insulating layer to electrically connect the first electrode to the first columnar portion.

2. The device according to claim 1, wherein the first connection portion includes at least one selected from Cu (copper), Ni (nickel), and Al (aluminum).

3. The device according to claim 1, wherein the second conductive member further includes a second connection portion having a portion extending along a plane perpendicular to a direction from the second major surface toward the first major surface to electrically connect the second electrode to the second columnar portion.

4. The device according to claim 1, wherein a first end surface on a side of the first conductive member opposite to the semiconductor stacked body and a second end surface on a side of the second conductive member opposite to the semiconductor stacked body are asymmetrical.

5. The device according to claim 1, wherein the first conductive member further includes a first surface layer provided on a first end surface on a side of the first conductive member opposite to the semiconductor stacked body, the first surface layer having a wettability higher than a wettability of a material of the first columnar portion.

6. The device according to claim 5, wherein the first surface layer includes a layer, and at least one processing selected from water-soluble preflux, electroless Ni/Au plating, and AuSn plating is performed on the layer.

7. The device according to claim 1, wherein the first columnar portion has a first surface-roughened portion provided in a side surface of the first columnar portion.

8. The device according to claim 1, wherein

the sealing member has a portion including a first sealing layer and a second sealing layer, a distance between the second sealing layer and the optical layer being longer than a distance between the first sealing layer and the optical layer,

the first sealing layer having a heat resistance higher than a heat resistance of the second sealing layer.

9. The device according to claim 1, further comprising a peripheral stacked unit provided opposing at least one side of the semiconductor stacked body in a plane perpendicular to a direction from the second major surface toward the first major surface, the peripheral stacked unit being made of a material of the semiconductor stacked body and being covered with the sealing member and the optical layer.

10. The device according to claim 1, wherein the optical layer includes a fluorescer layer and a hard film, the fluorescer layer including a fluorescer, the hard film being provided on a side of the fluorescer layer opposite to the semiconductor stacked body and having a hardness higher than a hardness of the fluorescer layer.

11. The device according to claim 1, wherein the first columnar portion and the second columnar portion include at least one selected from Cu (copper), Ni (nickel), and Al (aluminum).

12. The device according to claim 1, wherein the sealing member includes an epoxy resin containing at least one selected from a quartz filler and an alumina filler.

13. The device according to claim 1, wherein the insulating layer includes at least one selected from polyimide and polybenzoxazole.

14. The device according to claim 1, wherein a length of the first semiconductor layer along a direction from the first columnar portion toward the second columnar portion is longer than a length of the first semiconductor layer along a direction orthogonal to the direction from the first columnar portion toward the second columnar portion and a direction from the second major surface toward the first major surface.

15. The device according to claim 1, wherein a portion of the first semiconductor layer at the second major surface of the semiconductor stacked body is exposed by a portion of the second semiconductor layer and a portion of the light emitting layer being selectively removed, and the first electrode is provided on the exposed portion of the first semiconductor layer.

16. The device according to claim 1, wherein the first conductivity type is an n type and the second conductivity type is a p type.

17. The device according to claim 1, wherein a thermal decomposition temperature of the insulating layer is higher than a thermal decomposition temperature of the sealing member.

18. A method for manufacturing a semiconductor light emitting device, the semiconductor light emitting device including a light emitting unit, a first conductive member, an insulating layer, a second conductive member, a sealing member, and an optical layer, the light emitting unit including a semiconductor stacked body, a first electrode, and a second electrode, the semiconductor stacked body including a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer, the semiconductor stacked body having a first major surface on a first semiconductor layer side and a second major surface on a second semiconductor layer side, the first electrode being electrically connected to the first semiconductor layer on a second major surface side, the second electrode being electrically connected to the second semiconductor layer on the second major surface side, the first conductive member being electrically connected to the first electrode, the first conductive member including a first columnar portion provided on the second major surface to cover a portion of the second semiconductor layer on the second major surface side, the first columnar portion being separate from the second semiconductor layer, the insulating layer being provided between the first columnar portion and the portion of the second semiconductor layer on the second major surface side, the second conductive member being electrically connected to the second electrode and including a second columnar portion provided on the second major surface, the sealing member covering a side surface of the first conductive member and a side surface of the second conductive member, the optical layer being provided on the first major surface of the semiconductor stacked body and including a wavelength conversion unit configured to absorb an emitted light emitted from the light emitting layer and emit light having a wavelength different from a wavelength of the emitted light, the method comprising:

forming the insulating layer to cover the portion of the second semiconductor layer on the second major surface side; and

forming a conductive film on the insulating layer covering the portion of the second semiconductor layer on the second major surface side, the conductive film being used to form at least a portion of the first conductive member;

wherein the forming the insulating layer and the forming of the conductive film are implemented collectively for a plurality of the semiconductor stacked bodies provided on a substrate.