Spatial light modulator having capacitor
First Claim
Patent Images
1. An image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising:
- a first conductive layer to wire and function as a bit line;
a second conductive layer to wire and function as a word line; and
a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.
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Abstract
The present invention provides an image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising a first conductive layer to wire and function as a bit line; a second conductive layer to wire and function as a word line; and a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.
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Citations
27 Claims
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1. An image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising:
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a first conductive layer to wire and function as a bit line; a second conductive layer to wire and function as a word line; and a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising:
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a first conductive layer to wire and function as a bit line; a second conductive layer to wire and function as a word line; and a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor overlaps the word line. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification