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Spatial light modulator having capacitor

  • US 8,351,107 B2
  • Filed: 10/09/2009
  • Issued: 01/08/2013
  • Est. Priority Date: 11/01/2003
  • Status: Active Grant
First Claim
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1. An image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising:

  • a first conductive layer to wire and function as a bit line;

    a second conductive layer to wire and function as a word line; and

    a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.

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