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Method for generating high resolution surface topology map using surface profiling and surveying instrumentation

  • US 8,352,189 B2
  • Filed: 03/23/2009
  • Issued: 01/08/2013
  • Est. Priority Date: 02/02/2009
  • Status: Active Grant
First Claim
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1. A method for generating a surface topology map of a surface, comprising:

  • collecting a plurality of survey sample points of the surface from a surveying instrument;

    collecting a plurality of profile sample points of the surface from a profiler device;

    correlating on a data processing device the profile sample points with the survey sample points in the Z direction;

    merging on the data processing device the plurality of survey sample points and the correlated profile sample points; and

    generating, with the data processing device, the surface topology map of the surface from the merged plurality of survey sample points and the correlated profile sample points.

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