MEMS actuator assembly for optical switch
First Claim
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1. A micro-electro-mechanical system (MEMS) actuator assembly, comprising:
- a mirror;
a first actuator, comprising;
a first plurality of stationary comb teeth;
a first lever pivotable about a first fulcrum axis, the first lever having;
a first inner end hingedly coupled to a first side of the mirror; and
a first outer end comprising a first plurality of movable comb teeth interdigitated out of plane with the first plurality of stationary comb teeth to actuate the first lever;
a second actuator, comprising;
a second plurality of stationary comb teeth;
a second lever pivotable about a second fulcrum axis, the second lever having;
a second inner end hingedly coupled to a second side of the mirror; and
a second outer end comprising a second plurality of movable comb teeth interdigitated out of plane with the second plurality of stationary comb teeth to actuate the second lever;
a third actuator, comprising;
a third plurality of stationary comb teeth;
a third lever pivotable about a third fulcrum axis, the third lever having;
a third inner end hingedly coupled to a third side of the mirror; and
a third outer end comprising a third plurality of movable comb teeth interdigitated out of plane with the third plurality of stationary comb teeth to actuate the third lever; and
a fourth actuator, comprising;
a fourth plurality of stationary comb teethea fourth lever pivotable about a fourth fulcrum axis, the fourth lever having;
a fourth inner end hingedly coupled to a fourth side of the mirror; and
a fourth outer end comprising a fourth plurality of movable comb teeth interdigitated out of plane with the fourth plurality of stationary comb teeth to actuate the fourth lever.
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Abstract
A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.
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Citations
16 Claims
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1. A micro-electro-mechanical system (MEMS) actuator assembly, comprising:
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a mirror; a first actuator, comprising; a first plurality of stationary comb teeth; a first lever pivotable about a first fulcrum axis, the first lever having; a first inner end hingedly coupled to a first side of the mirror; and a first outer end comprising a first plurality of movable comb teeth interdigitated out of plane with the first plurality of stationary comb teeth to actuate the first lever; a second actuator, comprising; a second plurality of stationary comb teeth; a second lever pivotable about a second fulcrum axis, the second lever having; a second inner end hingedly coupled to a second side of the mirror; and a second outer end comprising a second plurality of movable comb teeth interdigitated out of plane with the second plurality of stationary comb teeth to actuate the second lever; a third actuator, comprising; a third plurality of stationary comb teeth; a third lever pivotable about a third fulcrum axis, the third lever having; a third inner end hingedly coupled to a third side of the mirror; and a third outer end comprising a third plurality of movable comb teeth interdigitated out of plane with the third plurality of stationary comb teeth to actuate the third lever; and a fourth actuator, comprising; a fourth plurality of stationary comb teethe a fourth lever pivotable about a fourth fulcrum axis, the fourth lever having; a fourth inner end hingedly coupled to a fourth side of the mirror; and a fourth outer end comprising a fourth plurality of movable comb teeth interdigitated out of plane with the fourth plurality of stationary comb teeth to actuate the fourth lever. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for operating a micro-electro-mechanical system (MEMS) actuator assembly, comprising:
applying one or more vertical forces on one or more outer ends of one or more levers, each pivotable about a fulcrum axis, to move one or more sides of a mirror hingedly coupled to one or more inner ends of the one or more levers to position the mirror in one of a plurality of positions. - View Dependent Claims (12, 13, 14, 15, 16)
Specification