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MEMS actuator assembly for optical switch

  • US 8,353,600 B1
  • Filed: 06/23/2010
  • Issued: 01/15/2013
  • Est. Priority Date: 06/23/2010
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical system (MEMS) actuator assembly, comprising:

  • a mirror;

    a first actuator, comprising;

    a first plurality of stationary comb teeth;

    a first lever pivotable about a first fulcrum axis, the first lever having;

    a first inner end hingedly coupled to a first side of the mirror; and

    a first outer end comprising a first plurality of movable comb teeth interdigitated out of plane with the first plurality of stationary comb teeth to actuate the first lever;

    a second actuator, comprising;

    a second plurality of stationary comb teeth;

    a second lever pivotable about a second fulcrum axis, the second lever having;

    a second inner end hingedly coupled to a second side of the mirror; and

    a second outer end comprising a second plurality of movable comb teeth interdigitated out of plane with the second plurality of stationary comb teeth to actuate the second lever;

    a third actuator, comprising;

    a third plurality of stationary comb teeth;

    a third lever pivotable about a third fulcrum axis, the third lever having;

    a third inner end hingedly coupled to a third side of the mirror; and

    a third outer end comprising a third plurality of movable comb teeth interdigitated out of plane with the third plurality of stationary comb teeth to actuate the third lever; and

    a fourth actuator, comprising;

    a fourth plurality of stationary comb teethea fourth lever pivotable about a fourth fulcrum axis, the fourth lever having;

    a fourth inner end hingedly coupled to a fourth side of the mirror; and

    a fourth outer end comprising a fourth plurality of movable comb teeth interdigitated out of plane with the fourth plurality of stationary comb teeth to actuate the fourth lever.

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