Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method
First Claim
1. A microelectromechanical device comprising:
- a first structural element;
a second structural element rotatably coupled to said first structural element;
an elastic supporting structure extending between said first and second structural elements and configured to enable a rotational movement of said second structural element with respect to the first structural element; and
an anti-stiction structure including at least one flexible element fixed to only the first structural element and, in a rest condition thereof, arranged at a first distance from the second structural element, said anti-stiction structure being configured to generate a repulsive force between the first and the second structural elements in the case of a relative movement of an amount greater than said first distance, wherein;
the first structural element comprises a mobile mass, and the second structural element comprises a load-bearing structure, or vice versa;
said load-bearing structure comprises a substrate, said movable mass being suspended above a surface of said substrate and being rotatably movable with respect to said surface, said flexible element having an elongated shape with a first end fixed to said movable mass and a second end provided with a protruding portion facing and arranged at said first distance from said surface; and
said mobile mass has a trench facing a side of the mobile mass and said flexible element extends within said trench.
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Accused Products
Abstract
An embodiment of a microelectromechanical device having a first structural element, a second structural element, which is mobile with respect to the first structural element, and an elastic supporting structure, which extends between the first and second structural elements to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure, which includes at least one flexible element, which is fixed only with respect to the first structural element and, in a condition of rest, is set at a first distance from the second structural element. The anti-stiction structure is designed to generate a repulsive force between the first and second structural elements in the case of relative movement by an amount greater than the first distance.
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Citations
17 Claims
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1. A microelectromechanical device comprising:
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a first structural element; a second structural element rotatably coupled to said first structural element; an elastic supporting structure extending between said first and second structural elements and configured to enable a rotational movement of said second structural element with respect to the first structural element; and an anti-stiction structure including at least one flexible element fixed to only the first structural element and, in a rest condition thereof, arranged at a first distance from the second structural element, said anti-stiction structure being configured to generate a repulsive force between the first and the second structural elements in the case of a relative movement of an amount greater than said first distance, wherein; the first structural element comprises a mobile mass, and the second structural element comprises a load-bearing structure, or vice versa; said load-bearing structure comprises a substrate, said movable mass being suspended above a surface of said substrate and being rotatably movable with respect to said surface, said flexible element having an elongated shape with a first end fixed to said movable mass and a second end provided with a protruding portion facing and arranged at said first distance from said surface; and said mobile mass has a trench facing a side of the mobile mass and said flexible element extends within said trench. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus, comprising:
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a substrate; a mass suspended above a surface of said substrate and being rotatably movable with respect to said surface, the mass having a trench facing a side of the mobile mass; a first elastic member having a first end coupled to the substrate and having a second end coupled to the mass, the first elastic member being configured to enable a rotational movement of the mass with respect to the substrate; and an anti-stiction structure including an anti-stiction element coupled to the mass and, in a rest condition thereof, arranged at a first distance from the substrate, said anti-stiction structure being configured to generate a repulsive force between the mass and substrate in the case of a relative movement of an amount greater than said first distance, said anti-stiction element having an elongated shape extending in the trench of the mass and having a first end coupled to said movable mass. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification