Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display
First Claim
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1. A method of measuring a margin for an electromechanical device, the device comprising an array of elements, the method comprising:
- initializing the elements of the array to a first state;
applying a positive hold voltage to a first portion of the array;
applying a negative hold voltage to a second portion of the array;
while applying the positive and negative hold voltages, applying a test pulse to the elements of the array;
applying a negative voltage transition to the first portion of the array to apply the negative hold voltage to the first portion of the array;
applying a positive voltage transition to the second portion of the array to apply the positive hold voltage to the second portion of the array;
sensing a difference between charge induced by the positive voltage transition and charge induced by the negative voltage transition to determine whether the test pulse changed the state of one or more elements of the array; and
determining the margin based on whether the test pulse changed the state of one or more elements of the array.
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Abstract
Methods and devices to measure voltage margins of electromechanical devices are disclosed. The voltage margins are determined based on responses to test voltages which cause the devices to change states. State changes of the devices are detected by monitoring integrated current or charge used to drive the devices with the test voltages.
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Citations
20 Claims
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1. A method of measuring a margin for an electromechanical device, the device comprising an array of elements, the method comprising:
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initializing the elements of the array to a first state; applying a positive hold voltage to a first portion of the array; applying a negative hold voltage to a second portion of the array; while applying the positive and negative hold voltages, applying a test pulse to the elements of the array; applying a negative voltage transition to the first portion of the array to apply the negative hold voltage to the first portion of the array; applying a positive voltage transition to the second portion of the array to apply the positive hold voltage to the second portion of the array; sensing a difference between charge induced by the positive voltage transition and charge induced by the negative voltage transition to determine whether the test pulse changed the state of one or more elements of the array; and determining the margin based on whether the test pulse changed the state of one or more elements of the array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electromechanical device, comprising:
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an array of elements configured to be driven to an actuated state as a result of being driven with an actuation voltage, to be driven to a released state as a result of being driven with a release voltage, and to maintain a current state as a result of being driven with a hold voltage; a driver configured to; initialize the elements to a first state, apply a positive hold voltage to a first portion of the array, apply a negative hold voltage to a second portion of the array, apply a test pulse to the elements of the array while applying the positive and negative hold voltages, apply a negative voltage transition to the first portion of the array to apply the negative hold voltage to the first portion of the array, apply a positive voltage transition to the second portion of the array to apply the positive hold voltage to the second portion of the array; a first circuit configured to sense a difference between charge induced by the positive voltage transition and charge induced by the negative voltage transition to determine whether the test pulse changed the state of one or more elements of the array; and a second circuit configured to determine the margin based on whether the test pulse changed the state of one or more elements of the array. - View Dependent Claims (11, 12, 13, 14, 15)
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16. An electromechanical device, comprising:
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an array of elements configured to be driven to an actuated state as a result of being driven with an actuation voltage, to be driven to a released state as a result of being driven with a release voltage, and to maintain a current state as a result of being driven with a hold voltage; means for initializing the elements of the array to a first state; means for applying a positive hold voltage to a first portion of the array; means for applying a negative hold voltage to a second portion of the array; means for applying a test pulse to the elements of the array while applying the positive and negative hold voltages; means for applying a negative voltage transition to the first portion of the array to apply the negative hold voltage to the first portion of the array; means for applying a positive voltage transition to the second portion of the array to apply the positive hold voltage to the second portion of the array; means for sensing a difference between charge induced by the positive voltage transition and charge induced by the negative voltage transition to determine whether the test pulse changed the state of one or more elements of the array; and means for determining the margin based on whether the test pulse changed the state of one or more elements of the array. - View Dependent Claims (17, 18, 19, 20)
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Specification