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Display device and manufacturing method of the same

  • US 8,357,021 B2
  • Filed: 10/25/2011
  • Issued: 01/22/2013
  • Est. Priority Date: 10/01/2004
  • Status: Active Grant
First Claim
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1. A method for manufacturing a light-emitting device, comprising the steps of:

  • forming a semiconductor film over an insulating surface;

    forming a gate insulating film over the semiconductor film;

    forming a gate electrode over the gate insulating film;

    forming an insulating film over the gate electrode;

    forming a contact hole reaching the semiconductor film by etching the gate insulating film and the insulating film;

    forming a conductive film electrically connected to the semiconductor film through the contact hole over the insulating film;

    forming a planarizing film covering the insulating film and the conductive film;

    exposing at least part of the conductive film by etching the planarizing film;

    forming a pixel electrode electrically connected to the conductive film;

    removing a region of the planarizing film not covered by the pixel electrode by etching; and

    forming a light-emitting element having the pixel electrode as an electrode.

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