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Micro-heaters, micro-heater arrays, methods for manufacturing the same and electronic devices using the same

  • US 8,357,879 B2
  • Filed: 05/09/2008
  • Issued: 01/22/2013
  • Est. Priority Date: 11/30/2007
  • Status: Active Grant
First Claim
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1. A micro-heater arranged on a substrate, the micro-heater comprising:

  • a heating section on the substrate and extended in a longitudinal direction;

    a plurality of connecting sections arranged in the longitudinal direction of the heating section, and extended from two sides of the heating section, each in a perpendicular direction with respect to the longitudinal direction of the heating section; and

    a plurality of support structures between the substrate and the plurality of connecting sections, to support the heating section and the plurality of connecting sections from underneath the plurality of connecting sections.

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