Splicing technique for fixed abrasives used in chemical mechanical planarization

• US 8,360,823 B2
• Filed: 06/15/2010
• Issued: 01/29/2013
• Est. Priority Date: 06/15/2010
• Status: Expired due to Fees

• Current Assignee: 3M Innovative Properties Company (3M Company)
• Original Assignee: 3M Innovative Properties Company (3M Company)
• Inventors: Gagliardi, John J.
• Primary Examiner(s): Wilson, Lee D
• Assistant Examiner(s): Carlson, Marc
• Application Number:
  US12/815,764
• Publication Number:
  US 20110306276A1
• Time in Patent Office: 959 Days
• Field of Search: 451/41, 451/59, 451/527, 451/529, 451/533, 451/538, 451/539, 451/531
• US Class Current: 451/28
• CPC Class Codes: B24B 37/245 Pads with fixed abrasives
• CPC Class Codes: B24D 7/14 Zonally-graded wheels; Composite wheels comprising different abrasives

Abstract

An abrasive article includes a support pad, a first abrasive element, a second abrasive element and a fixation mechanism. The support pad has a first major surface, a second major surface, a first edge, a second edge and a channel. The channel is formed within the first major surface and extends from the first edge to the second edge. The first and second abrasive elements are each positionable over a portion of the support pad. The fixation mechanism is positioned within the channel ad secures an edge of the first abrasive element and an edge of the second abrasive element to the support pad.

Claims

1. An abrasive article comprising:

a support pad having a first major surface, a second major surface, a first edge, a second edge and a channel, wherein the channel is formed within the first major surface and extends from the first edge to the second edge;

a first abrasive element positionable over a portion of the support pad;

a second abrasive element positionable over a portion of the support pad; and

a fixation mechanism positioned within the channel for securing an edge of the first abrasive element and an edge of the second abrasive element to the support pad.

2. The abrasive article of claim 1, wherein the edges of the first and second abrasive elements are secured to the support pad by separate fixation mechanisms.

3. The abrasive article of claim 1, wherein the edges of the first and second abrasive elements are secured to the support pad by a single fixation mechanism.

4. The abrasive article of claim 1, wherein the fixation mechanism comprises:

a rigid material having a plurality of slits; and

a mechanism to maintain the edge of the first abrasive element within one of the slits.

5. The abrasive article of claim 4, wherein the mechanism to maintain the edge of the first abrasive element within one of the slits comprises one of a vacuum and a clamp.

6. The abrasive article of claim 1, wherein the fixation mechanism comprises one of a pressure sensitive adhesive, a hook and loop attachment, a mechanical attachment or a permanent adhesive.

7. A fixed abrasive article comprising:

a pad having a first major surface and a second major surface;

a first abrasive element positionable over a portion of the first major surface;

a second abrasive element positionable over a portion of the first major surface; and

a fixation mechanism located below a plane defined by the first major surface, wherein the fixation mechanism attaches an edge of the first abrasive element and an edge of the second abrasive element to the pad.

8. The fixed abrasive article of claim 7, wherein the first major surface includes a channel within the first major surface defining a floor, a first side wall and a second side wall.

9. The fixed abrasive article of claim 7, wherein the edges of the first and second abrasive elements are attached to the pad by separate fixation mechanisms.

10. The fixed abrasive article of claim 7, wherein the edges of the first and second abrasive elements are attached to the pad by a single fixation mechanism.

11. The fixed abrasive article of claim 8, wherein the fixation mechanism attaches the edges of the first and second abrasive elements within the channel.

12. The fixed abrasive article of claim 8, wherein the fixation mechanism comprises one of a pressure sensitive adhesive, a hook and loop attachment, a mechanical attachment or a permanent adhesive.

13. The fixed abrasive article of claim 7, wherein the fixation mechanism comprises:

a block having a first slit and a second slit; and

a mechanism to maintain the edge of the first abrasive element within the first slit and the edge of the second abrasive element within the second slit.

14. The fixed abrasive article of claim 13, wherein the mechanism to maintain the edges of the first and second abrasive elements within the first and second slits, respectively, comprises one of a vacuum and a clamp.

15. A method of polishing a surface of a workpiece comprising:

providing a support pad having a first major surface, a first edge, a second edge, and a channel located within the first major surface extending from the first edge to the second edge;

covering a portion of the first major surface of the support pad with a first abrasive element;

positioning an edge of the first abrasive element within the channel of the support pad;

covering a portion of the first major surface of the support pad with a second abrasive element;

positioning an edge of the second abrasive element within the channel of the support pad;

maintaining the edges of the first and second abrasive elements within the channel;

contacting the first and second abrasive elements with the surface of the workpiece; and

moving the workpiece and the fixed abrasive elements with respect to each other.

16. The method of claim 15, further comprising incrementally advancing the first and second abrasive elements from the first edge toward the second edge of the support pad.

17. The method of claim 15, wherein maintaining the edges of the first and second abrasive elements within the channel comprises one of a vacuum and a clamp.

18. The method of claim 15, wherein maintaining the edges of the first and second abrasive elements within the channel comprises bonding the edges within the channel.

19. The method of claim 18, wherein bonding the edges within the channel comprises using one of a pressure sensitive adhesive, a hook and loop attachment, a mechanical attachment or a permanent adhesive.

20. The method of claim 15, wherein positioning the edges of the first and second abrasive elements within the channel comprises inserting the edges into a rigid block.