×

Integrated circuits and methods of forming the same

  • US 8,362,591 B2
  • Filed: 06/08/2010
  • Issued: 01/29/2013
  • Est. Priority Date: 06/08/2010
  • Status: Active Grant
First Claim
Patent Images

1. A varactor for a voltage-controlled oscillator (VCO), comprising:

  • a) a semiconductor substrate having an opening extending through a first surface and a second surface of the substrate, wherein the first surface and the second surface are opposite surfaces of the substrate;

    b) a dielectric layer disposed on a side surface in the opening;

    c) a conductive material formed on the dielectric layer and substantially filling the opening to form a conductive through-substrate-via (TSV); and

    d) an impurity implanted region disposed in the substrate surrounding and directly contacting the TSV and the dielectric layer and substantially extending from the first surface to the second surface of the substrate.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×