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Mechanical resonating structures including a temperature compensation structure

  • US 8,362,675 B2
  • Filed: 11/07/2011
  • Issued: 01/29/2013
  • Est. Priority Date: 12/17/2008
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a mechanical resonating structure configured to support Lamb waves, the mechanical resonating structure including;

    an active layer; and

    a multi-layer compensating structure coupled to the active layer, the multi-layer compensating structure comprising;

    first and second layers each having a stiffness that increases with increasing temperature over at least a first temperature range; and

    a third layer between the first layer and the second layer, the third layer being formed of a material different than a material of which at least one of the first and second layers is formed.

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