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Altering capacitance of MIM capacitor having reactive layer therein

  • US 8,363,379 B2
  • Filed: 08/18/2010
  • Issued: 01/29/2013
  • Est. Priority Date: 08/18/2010
  • Status: Active Grant
First Claim
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1. A method comprising:

  • forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer,wherein the reactive layer includes a tunable dielectric constant material; and

    altering the reactive layer to change a capacitive value of the MIM capacitor, wherein the altering includes creating a dipole moment change in the reactive layer to change a dielectric constant of the tunable dielectric constant material.

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