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Method for sensing acceleration using a translational mass in-plane MEMS accelerometer

  • US 8,365,596 B2
  • Filed: 06/15/2010
  • Issued: 02/05/2013
  • Est. Priority Date: 07/09/2009
  • Status: Active Grant
First Claim
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1. A method for sensing acceleration using an in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device, the method comprising:

  • fabricating a proof mass with flex elements that constrain movement of the proof mass to a transverse direction in-plane, parallel to a major plane of the device;

    forming at least one isolated conductive coil trace within a material of the proof mass;

    generating a magnetic flux field, the magnetic flux field being perpendicular to the major plane wherein the generated magnetic flux field intersects at least one section of the at least one conductive coil trace located within the proof mass;

    generating a signal representative of an in-plane position of the proof mass;

    generating a drive signal based on the generated position signal;

    applying a current to the at least one conductive coil trace based on the generated drive signal to develop a Lorentz force on the proof mass that opposes an inertial acceleration force on the proof mass; and

    outputting, based on the generated drive signal, a signal that represents the acceleration being sensed,wherein forming the at least one conductive coil trace comprises;

    applying a dopant to locations associated with the at least one conductive coil trace; and

    applying a dielectric insulator around the at least one conductive coil trace, thereby isolating the at least one conductive coil trace from other traces or adjacent regions of the proof mass.

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