Methods for producing ZMWs with islands of functionality
First Claim
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1. A method for obtaining an island, of functionality at the bases of an array of zero mode waveguides comprising:
- a) providing an electrochemical system comprising a working electrode, a counter electrode, and optionally a reference electrode, the working electrode in contact with an electrolyte solution;
b) providing a substrate having a lower transparent layer and an upper cladding layer, wherein the cladding layer comprises an array of apertures disposed through the cladding layer to the transparent layer, the apertures having side walls, wherein the cladding layer comprises the working electrode;
c) applying a voltage to the working electrode such that a layer of oxide is formed onto the side walls of the aperture;
d) attaching a functionalizing agent to exposed regions of the transparent layer within the apertures; and
e) dissolving the oxide layer from the walls of the aperture whereby islands of the functionalizing agent are formed within the apertures.
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Abstract
The application relates to methods for producing islands of functionality within nanoscale apertures. Islands of functionality can be produced by growing an aperture constriction layer from the walls, functionalizing the exposed base of the aperture, then removing the aperture constriction layer. The aperture constriction layer can be produced, for example, by anodically growing an oxide layer onto a cladding through which the aperture extends. The islands of functionality can be used to bind a single molecule of interest, such as an enzyme within the nanoscale aperture.
36 Citations
23 Claims
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1. A method for obtaining an island, of functionality at the bases of an array of zero mode waveguides comprising:
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a) providing an electrochemical system comprising a working electrode, a counter electrode, and optionally a reference electrode, the working electrode in contact with an electrolyte solution; b) providing a substrate having a lower transparent layer and an upper cladding layer, wherein the cladding layer comprises an array of apertures disposed through the cladding layer to the transparent layer, the apertures having side walls, wherein the cladding layer comprises the working electrode; c) applying a voltage to the working electrode such that a layer of oxide is formed onto the side walls of the aperture; d) attaching a functionalizing agent to exposed regions of the transparent layer within the apertures; and e) dissolving the oxide layer from the walls of the aperture whereby islands of the functionalizing agent are formed within the apertures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for producing an array of nanostructures comprising:
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a) providing a substrate having a top surface, the top surface having an aperture layer, the aperture layer having a plurality of apertures extending through the aperture layer to the substrate, wherein the substrate is exposed by the apertures, each of the apertures having one or more cross-sectional dimension; b) oxidizing the substrate whereby an oxide layer is formed on the aperture layer, whereby a cross sectional dimension of the apertures is brought to 50 nm or smaller, leaving a portion of the substrate exposed; c) treating the substrate with a functionalizing agent whereby the functionalizing agent becomes attached to the exposed portions of the substrate; d) exposing the substrate to nanostructures to attach the nanostructures to the functionalizing agent attached to the substrate; and e) dissolving the oxide layer whereby islands of the functionalizing agent are formed within the apertures. - View Dependent Claims (12)
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13. A method for producing an island of functionalizing agent in an array of zero mode waveguides comprising:
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a) providing a substrate having on its surface a cladding layer, wherein the cladding layer comprises an array of apertures disposed through the cladding layer to the substrate, the apertures having side walls; b) selectively growing an aperture constriction layer on the cladding layer such that the aperture constriction layer extends in from the side walls of the aperture to reduce the cross-sectional dimensions of the aperture; c) attaching a functionalizing agent to exposed regions of the substrate within the apertures; and d) removing the aperture constriction layer whereby an array of apertures, each having an island of the functionalizing agent is produced. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification