Display device and method of fabricating the same
First Claim
1. A display device comprising:
- a pixel portion comprising a plurality of pixels over a substrate,wherein each of the pixels provided with a pixel electrode,wherein the pixel electrode is connected to the semiconductor element, andwherein the semiconductor element comprises;
an activation layer,a gate insulating film in contact with the activation layer,a gate electrode opposed to the activation layer through the gate insulating film,a first insulating nitride film including argon provided on an upper side of the activation layer,a first organic resin film provided over the first insulating nitride film,a second insulating nitride film including argon provided over the first organic resin film,a wiring provided over the second insulating nitride film,a second organic resin film provided over the wiring, anda third insulating nitride film including argon provided over the second organic resin film and a metal film added with Li provided over the third insulating nitride film;
wherein an inner wall face of a first opening portion provided at the first organic resin film is covered by the second insulating nitride film, further comprising;
a second opening portion provided at a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film on an inner side of the first opening portion;
wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion; and
wherein the pixel electrode is provided at a layer on a lower side of the activation layer and connected to the semiconductor element through the wiring.
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Accused Products
Abstract
To achieve promotion of stability of operational function of display device and enlargement of design margin in circuit design, in a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate, the semiconductor element includes a photosensitive organic resin film as an interlayer insulating film, an inner wall face of a first opening portion provided at the photosensitive organic resin film is covered by a second insulating nitride film, a second opening portion provided at an inorganic insulating film is provided on an inner side of the first opening portion, the semiconductor and a wiring are connected through the first opening portion and the second opening portion and the pixel electrode is provided at a layer on a lower side of an activation layer.
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Citations
21 Claims
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1. A display device comprising:
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a pixel portion comprising a plurality of pixels over a substrate, wherein each of the pixels provided with a pixel electrode, wherein the pixel electrode is connected to the semiconductor element, and wherein the semiconductor element comprises; an activation layer, a gate insulating film in contact with the activation layer, a gate electrode opposed to the activation layer through the gate insulating film, a first insulating nitride film including argon provided on an upper side of the activation layer, a first organic resin film provided over the first insulating nitride film, a second insulating nitride film including argon provided over the first organic resin film, a wiring provided over the second insulating nitride film, a second organic resin film provided over the wiring, and a third insulating nitride film including argon provided over the second organic resin film and a metal film added with Li provided over the third insulating nitride film; wherein an inner wall face of a first opening portion provided at the first organic resin film is covered by the second insulating nitride film, further comprising; a second opening portion provided at a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film on an inner side of the first opening portion; wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion; and wherein the pixel electrode is provided at a layer on a lower side of the activation layer and connected to the semiconductor element through the wiring. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A display device comprising:
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a pixel portion comprising a plurality of pixels over a substrate, wherein each of the pixels is provided with a pixel electrode, wherein the pixel electrode is connected to a semiconductor element, and wherein the semiconductor element comprises; an activation layer; a gate insulating film in contact with the activation layer; a gate electrode opposed to the activation layer through the gate insulating film; a first insulating nitride film over the activation layer; a first organic resin film over the first insulating nitride film; a second insulating nitride film over the first organic resin film; a wiring over the second insulating nitride film; a second organic resin film over the wiring; a third insulating nitride film including argon provided over the second organic resin film; and a metal film added with Li provided over the third insulating nitride film, wherein an inner wall face of a first opening portion formed in the first organic resin film is covered by the second insulating nitride film, wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion, wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion, wherein the pixel electrode is connected to the semiconductor element through the wiring electrically, wherein a first part of an insulating film is formed over the pixel electrode, and wherein the activation layer is formed over a second part of the insulating film. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A display device comprising a pixel portion comprising a plurality of pixels over a substrate,
wherein each of the pixels is provided with a pixel electrode, wherein the pixel electrode is connected to a semiconductor element, and wherein the semiconductor element comprises: -
an activation layer; a gate insulating film in contact with the activation layer; a gate electrode opposed to the activation layer through the gate insulating film; a first insulating nitride film over the activation layer; a first organic resin film over the first insulating nitride film; a second insulating nitride film over the first organic resin film; a wiring over the second insulating nitride film; a second organic resin film over the wiring; and a third insulating nitride film including argon over the second organic resin film, wherein an inner wall face of a first opening portion formed in the first organic resin film is covered by the second insulating nitride film, wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion, wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion, wherein the pixel electrode is connected to the semiconductor element through the wiring electrically, wherein a first part of an insulating film is formed over the pixel electrode, and wherein the activation layer is formed over a second part of the insulating film. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification