Semiconductor device packages with electromagnetic interference shielding

• US 8,368,185 B2
• Filed: 11/19/2009
• Issued: 02/05/2013
• Est. Priority Date: 11/19/2009
• Status: Active Grant

• Current Assignee: Advanced Semiconductor Engineering Inc (ASE Technology Holding Co., Ltd.)
• Original Assignee: Advanced Semiconductor Engineering Inc (ASE Technology Holding Co., Ltd.)
• Inventors: Lee, Yuyong, Kim, Seokbong
• Primary Examiner(s): Luu, Chuong A.
• Application Number:
  US12/622,419
• Publication Number:
  US 20110115059A1
• Time in Patent Office: 1,174 Days
• Field of Search: 257/659, 257/662, 257/664, 257/508, 257/660, 257/690, 257/708, 257/688
• US Class Current: 257/659
• CPC Class Codes: H01L 21/561 Batch processing
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/81 using a bump connector
• CPC Class Codes: H01L 2224/97 the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
• CPC Class Codes: H01L 23/3121 a substrate forming part of the encapsulation
• CPC Class Codes: H01L 23/49805 the leads being also applied on the sidewalls or the bottom of the substrate, e.g. leadless packages for surface mounting
• CPC Class Codes: H01L 23/552 Protection against radiation, e.g. light or electromagnetic waves
• CPC Class Codes: H01L 24/97 the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/01005 Boron [B]
• CPC Class Codes: H01L 2924/01006 Carbon [C]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01024 Chromium [Cr]
• CPC Class Codes: H01L 2924/01029 Copper [Cu]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/01047 Silver [Ag]
• CPC Class Codes: H01L 2924/01078 Platinum [Pt]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/01082 Lead [Pb]
• CPC Class Codes: H01L 2924/014 Solder alloys
• CPC Class Codes: H01L 2924/12041 : LED
• CPC Class Codes: H01L 2924/15159 : Side view
• CPC Class Codes: H01L 2924/181 : Encapsulation
• CPC Class Codes: H01L 2924/3025 : Electromagnetic shielding

Abstract

Described herein are semiconductor device packages with EMI shielding and related methods. In one embodiment, a semiconductor device package includes a circuit substrate, an electronic device, an encapsulant, and a conductive coating. The circuit substrate includes a carrying surface, a bottom surface, a lateral surface extending between the carrying surface and the bottom surface, a conductive layer, and a grounding ring. The grounding ring is in a substantially continuous pattern extending along a border of the circuit substrate, is exposed at a lateral surface of the circuit substrate, and is included in the conductive layer. The electronic device is disposed adjacent to the carrying surface and is electrically connected to the conductive layer of the circuit substrate. The encapsulant is disposed adjacent to the carrying surface and encapsulates the electronic device. The conductive coating is applied to the encapsulant and the grounding ring.

Claims

1. A semiconductor package, comprising:

a substrate including;

a first grounding ring, wherein a portion of the first grounding ring is exposed at a lateral periphery of the substrate;

a second grounding ring, wherein a portion of the second grounding ring is exposed at the lateral periphery of the substrate, and the first grounding ring overlies the second grounding ring; and

a dielectric disposed between the first grounding ring and the second grounding ring;

a die disposed adjacent to and electrically connected to the substrate;

an encapsulant disposed adjacent to the substrate and encapsulating the die, the encapsulant having exterior surfaces; and

a shield substantially covering the exterior surfaces of the encapsulant and connected to the exposed portion of the first grounding ring and the exposed portion of the second grounding ring to enhance reliability of electromagnetic interference shielding.

2. The semiconductor package of claim 1, wherein:

a portion of the lateral periphery of the substrate is inwardly recessed to form a recessed part; and

the portion of the first grounding ring and the portion of the second grounding ring are exposed at the recessed part.

3. The semiconductor package of claim 2, wherein:

the substrate includes a third grounding ring including a portion exposed at a bottom of the recessed part; and

the shield is connected to the exposed portion of the third grounding ring.

4. The semiconductor package of claim 1, wherein the first grounding ring and the second grounding ring are embedded in the substrate.

5. The semiconductor package of claim 1, wherein the encapsulant is disposed on the first grounding ring.

6. The semiconductor package of claim 1, wherein the exposed portions of the first grounding ring and the second grounding ring each circumscribe the substrate.

7. The semiconductor package of claim 1, wherein the shield contacts and substantially covers the exposed portions of the first grounding ring and the second grounding ring.

8. A semiconductor package, comprising:

substrate including;

an upper surface, a lower surface, and a side surface extending between the upper surface and the lower surface;

a first conductive layer including a first internal grounding trace extending laterally to the side surface;

a second conductive layer including a second internal grounding trace extending laterally to the side surface; and

a dielectric separating the first conductive layer from the second conductive layer;

a package body having a periphery, wherein a first portion of the periphery is disposed adjacent to the upper surface of the substrate and a second portion of the periphery faces away from the substrate; and

an electromagnetic interference shield substantially covering the second portion of the periphery of the package body and the side surface of the substrate, wherein the electromagnetic interference shield contacts the first internal grounding trace and the second internal grounding trace at the side surface of the substrate to enhance reliability of electromagnetic interference shielding.

9. The semiconductor package of claim 8, wherein the first internal grounding trace and the second internal grounding trace each extend at least fifty percent around the substrate in corresponding planes substantially parallel to the upper surface of the substrate, and the first internal grounding trace overlies the second internal grounding trace.

10. The semiconductor package of claim 8, wherein the first internal grounding trace and the second internal grounding trace each circumscribe the substrate.

11. The semiconductor package of claim 8, wherein the electromagnetic interference shield substantially covers portions of the first internal grounding trace and the second internal grounding trace exposed at the side surface of the substrate.

12. The semiconductor device package of claim 8, wherein:

a portion of the side surface of the substrate is inwardly recessed to form a recessed part; and

the first internal grounding trace and the second internal grounding trace extend to the recessed part.

13. The semiconductor device package of claim 12, wherein the second internal grounding trace is exposed at a bottom of the recessed part.

14. A semiconductor package comprising:

a substrate including;

a first grounding layer extending around a border of the substrate, wherein a portion of the first grounding layer is exposed at a lateral periphery of the substrate;

a second grounding layer extending around the border of the substrate, wherein a portion of the second grounding layer is exposed at the lateral periphery of the substrate, and the first grounding layer is disposed above the second grounding layer; and

a dielectric disposed between the first grounding layer and the second grounding layer;

a package body disposed adjacent to the substrate; and

a conductive shield circumscribing the package body and covering the exposed portions of the first grounding layer and the second grounding layer to enhance reliability of electromagnetic interference shielding.

15. The semiconductor package of claim 14, wherein the first grounding layer and the second grounding layer each extend around the border of the substrate in a continuous pattern.

16. The semiconductor package of claim 14, wherein:

a portion of the border of the substrate is inwardly recessed to form a recessed part; and

the portion of the first grounding layer and the portion of the second grounding layer are exposed at the recessed part.

17. The semiconductor package of claim 16, wherein:

the substrate includes a third grounding layer including a portion exposed at a bottom of the recessed part; and

the conductive shield is connected to the exposed portion of the third grounding layer.

18. The semiconductor package of claim 16, wherein a bottom of the recessed part is curved.

19. The semiconductor package of claim 14, wherein the conductive shield contacts the exposed portions of the first grounding layer and the second grounding layer.

20. The semiconductor package of claim 14, wherein:

the package body is disposed adjacent to an upper surface of the substrate; and

the first grounding layer and the second grounding layer each extend at least fifty percent around the substrate in corresponding planes substantially parallel to the upper surface of the substrate.