MEMS device with independent rotation in two axes of rotation
First Claim
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1. A MEMS arrangement comprising:
- a plurality of MEMS devices arranged in an array, each MEMS device of the plural MEMS devices being adjacent to at least an adjacent MEMS device, and each MEMS device comprising;
a substrate;
a first rotatable element;
a support structure anchored to a substrate;
at least one support element that supports the first rotatable element to the support structure so as to be rotatable with respect to the support structure in a first axis of rotation;
wherein a first support element of said at least one support element is configured to extend laterally to be at least partially within an outline of an adjacent MEMS device.
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Abstract
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
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Citations
22 Claims
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1. A MEMS arrangement comprising:
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a plurality of MEMS devices arranged in an array, each MEMS device of the plural MEMS devices being adjacent to at least an adjacent MEMS device, and each MEMS device comprising; a substrate; a first rotatable element; a support structure anchored to a substrate; at least one support element that supports the first rotatable element to the support structure so as to be rotatable with respect to the support structure in a first axis of rotation; wherein a first support element of said at least one support element is configured to extend laterally to be at least partially within an outline of an adjacent MEMS device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification