Electromechanical device with optical function separated from mechanical and electrical function

• US 8,368,997 B2
• Filed: 03/25/2011
• Issued: 02/05/2013
• Est. Priority Date: 07/02/2007
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Endisch, Denis, Mignard, Marc
• Primary Examiner(s): Spector, David N
• Application Number:
  US13/072,160
• Publication Number:
  US 20110170168A1
• Time in Patent Office: 683 Days
• Field of Search: 359/290, 359/291, 359/292, 359/295
• US Class Current: 359/291
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 3/0083 Optical properties
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

In certain embodiments, a microelectromechanical (MEMS) device includes a movable element over the substrate and an actuation electrode. The movable element includes an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The actuation electrode is under at least a portion of the deformable layer and is disposed laterally from the reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving towards the actuation electrode.

Claims

1. An electromechanical device comprising:

a movable element including

an electrically conductive deformable layer; and

a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; and

an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving towards the actuation electrode.

2. The device of claim 1, wherein the reflective surface is spaced from the deformable layer along a direction generally parallel to the reflective surface.

3. The device of claim 1, wherein the reflective element is mechanically coupled to a top surface of the deformable layer.

4. The device of claim 1, wherein the reflective element is mechanically coupled to a bottom surface of the deformable layer.

5. The device of claim 1, wherein the device is configured such that the reflective surface is not in contact with a surface of the device when an actuation voltage difference is applied between the actuation electrode and the deformable layer.

6. The device of claim 1, wherein application of a voltage difference between the actuation electrode and the deformable layer causes movement of the deformable layer and movement of the reflective surface, the movement of the deformable layer parallel to the movement of the reflective surface, the movement of the deformable layer on a different plane than the movement of the reflective surface.

7. The device of claim 1, further comprising a second actuation electrode over the movable element, wherein the movable element is further responsive to a voltage difference applied between the second actuation electrode and the movable element by moving towards the second actuation electrode.

8. The device of claim 1, wherein a surface between the deformable layer and the actuation electrode is roughened.

9. The device of claim 1, further comprising an anti-stiction layer between the deformable layer and the actuation electrode.

10. The device of claim 1, wherein the reflective surface is a fully reflective surface.

11. The device of claim 1, wherein the portion of the deformable layer is configured to deform.

12. The device of claim 1, further comprising a post at each corner.

13. The device of claim 12, wherein the reflective element includes cutouts laterally spacing the reflective element from each said post.

14. The device of claim 1, wherein the movable element further includes at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer.

15. The device of claim 14, further comprising a first connecting element mechanically coupled to a first edge of the reflective element and a second connecting element mechanically coupled to a second edge of the reflective element, the first edge positioned substantially opposite the second edge.

16. The device of claim 14, wherein the reflective element includes a plurality of edges, and wherein the at least one connecting element mechanically couples each of the plurality of edges to the deformable layer.

17. The device of claim 14, wherein the at least one connecting element includes at least one protrusion extending from the reflective element.

18. The device of claim 14, wherein a thickness of the at least one connecting element is less than a thickness of the reflective element.

19. The device of claim 1, further comprising:

a display;

a processor configured to communicate with the display, the processor configured to process image data; and

a memory device configured to communicate with the processor.

20. The device of claim 19, further comprising an input device configured to receive input data and to communicate the input data to the processor.

21. The device of claim 19, further comprising an image source module configured to send said image data to the processor.

22. The device of claim 21, wherein the image source module includes at least one of a receiver, a transceiver, and a transmitter.

23. The device of claim 19, further comprising a driver circuit configured to send at least one signal to the display.

24. The device of claim 23, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

25. An electromechanical device comprising:

a movable element including

electrically conductive means for deforming; and

means for reflecting, the reflecting means mechanically coupled to the deforming means, the reflecting means including a reflective surface; and

means for actuating the movable element, the actuating means under at least a portion of the deforming means and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuating means and the deforming means by moving towards the actuating means.

26. The device of claim 25, wherein the deforming means includes a deformable layer, or wherein the reflecting means includes a reflective element, or wherein the actuating means includes an actuation electrode.

27. The device of claim 25, wherein the reflective surface is a fully reflective surface.