Micro-heaters, methods for manufacturing the same, and methods for forming patterns using the micro-heaters
First Claim
1. A micro-heater comprising:
- a metal pattern on a substrate, an uppermost surface of the metal pattern defined by a first plane;
a support beneath the metal pattern, the support securing the metal pattern to the substrate while spacing the metal pattern apart from the substrate; and
a spacer on the substrate and adjacent to the metal pattern, an uppermost surface of the spacer defined by a second plane, a first distance from the substrate to the first plane being less than a second distance from the substrate to the second plane.
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Accused Products
Abstract
Example embodiments relate to micro-heaters, micro-heater arrays, methods for manufacturing the micro-heater, and methods for forming a pattern using the micro-heater. A micro-heater according to example embodiments may include a metal pattern formed on a substrate. A support may be formed beneath the metal pattern, the support securing the metal pattern to the substrate while spacing the metal pattern apart from the substrate. A spacer may be formed on the substrate and adjacent to the metal pattern, a first distance from the substrate to the top surface of the spacer being greater than a second distance from the substrate to the top surface of the metal pattern. The distance between the micro-heater and a target substrate positioned above the metal pattern may be controlled by the spacer, thus allowing the formation of a relatively fine pattern on the target substrate.
35 Citations
22 Claims
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1. A micro-heater comprising:
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a metal pattern on a substrate, an uppermost surface of the metal pattern defined by a first plane; a support beneath the metal pattern, the support securing the metal pattern to the substrate while spacing the metal pattern apart from the substrate; and a spacer on the substrate and adjacent to the metal pattern, an uppermost surface of the spacer defined by a second plane, a first distance from the substrate to the first plane being less than a second distance from the substrate to the second plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 16, 17, 18, 19, 20, 21, 22)
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10. A method for manufacturing a micro-heater, comprising:
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forming and patterning a heating layer on a substrate, an uppermost surface of the patterned heating layer defined by a first plane; forming an insulating layer on the substrate, the insulating layer being thicker than the patterned heating layer; and etching the insulating layer and a portion of the substrate to form a spacer adjacent to the patterned heating layer along with a support positioned between the patterned heating layer and the etched substrate, an uppermost surface of the spacer defined by a second plane, a first distance from the substrate to the first plane being less than a second distance from the substrate to the second plane. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification