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Optical measuring apparatus, optical measuring method, and storage medium that stores optical measuring program

  • US 8,369,914 B2
  • Filed: 05/31/2007
  • Issued: 02/05/2013
  • Est. Priority Date: 05/31/2006
  • Status: Active Grant
First Claim
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1. An optical measuring apparatus comprising:

  • a light emitter for irradiating with light a layered structure which is an object of measurement, the layered structure comprising a plurality of layers including at least a superficial layer and a deep layer;

    a light receiver for receiving, at a position at a first predetermined distance from the light emitter, light emitted from the light emitter and transmitted through the superficial layer and the deep layer, and for receiving, at a position at a second predetermined distance from the light emitter, light which is emitted from the light emitter and transmitted through the superficial layer and the deep layer and which has a deep layer transmission distance which is different from that of the light received at the position at the first predetermined distance from the light emitter;

    a spatial slope computation device for obtaining a spatial slope based on intensities of the light received at the position at the first predetermined distance from the light emitter and the light received at the position at the second predetermined distance from the light emitter;

    storage means in which a computation parameter for computing a degree of light absorption in the deep layer is stored for each superficial layer;

    an input device for inputting a thickness for each superficial layer; and

    computing means for reading a stored computation parameter corresponding to an input superficial layer thickness, and obtaining the degree of light absorption in the deep layer based on a quadratic function of the spatial slope including the read computation parameter.

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