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Pedestal covers

  • US 8,371,567 B2
  • Filed: 04/13/2011
  • Issued: 02/12/2013
  • Est. Priority Date: 04/13/2011
  • Status: Expired due to Fees
First Claim
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1. A pedestal for supporting a semiconductor substrate in an apparatus for processing the semiconductor substrate, the pedestal comprising:

  • a metal platen comprising an upper surface for providing heat to the semiconductor substrate;

    a removable ceramic cover for providing substantially uniform heat transfer to the semiconductor substrate positioned over a substrate-facing surface of the removable ceramic cover during processing of the semiconductor substrate in the apparatus, the removable ceramic cover positioned over the upper surface of the metal platen; and

    wherein the upper surface of the metal platen comprises a set of supports protruding through openings in the removable ceramic cover, the set of supports configured to support the semiconductor substrate above the substrate-facing surface of the removable ceramic cover at an average predetermined distance.

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