Asymmetric membrane cMUT devices and fabrication methods
First Claim
1. In a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy, the forward or side looking intravascular device comprising:
- a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement so that the cMUT arrays are disposed at differing locations,the plurality of cMUT arrays comprising a plurality of cMUT elements, at least a portion of the plurality of cMUT elements each comprising a flexible membrane disposed above the membrane, the membrane having a uniform thickness and being asymmetric about a line of bisection across the length of the membrane.
1 Assignment
0 Petitions
Accused Products
Abstract
Asymmetric membrane capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
-
Citations
15 Claims
-
1. In a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy, the forward or side looking intravascular device comprising:
-
a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement so that the cMUT arrays are disposed at differing locations, the plurality of cMUT arrays comprising a plurality of cMUT elements, at least a portion of the plurality of cMUT elements each comprising a flexible membrane disposed above the membrane, the membrane having a uniform thickness and being asymmetric about a line of bisection across the length of the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A cMUT-based device configured as a forward or side looking intravascular ultrasonic array device that comprises a plurality of cMUT devices, the forward or side looking ultrasonic array device comprising:
-
a plurality of cMUT devices formed in a plurality of array portions, the array portions being disposed at differing locations of a substrate that carries the cMUT devices; and at least a portion of the cMUT devices comprising one or more electrodes and a membrane that defines a cavity situated between the membrane and the substrate, the membrane being asymmetric about a line of bisection across the length of the membrane; and
wherein the one or more electrodes are configured to receive and transmit ultrasonic signals. - View Dependent Claims (12, 13, 14, 15)
-
Specification