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Probe card assembly and kit, and methods of making same

  • US 8,373,428 B2
  • Filed: 08/04/2009
  • Issued: 02/12/2013
  • Est. Priority Date: 11/16/1993
  • Status: Expired due to Fees
First Claim
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1. A probe card assembly comprising:

  • a space transformer substrate comprising a first surface, a second surface opposite the first surface, first electrically conductive terminals disposed on the first surface, and second electrically conductive terminals disposed on the second surface;

    electrically conductive resilient contact structures mounted to the first terminals;

    a printed circuit board comprising a third surface, a fourth surface opposite the third surface, and third electrically conductive terminals disposed on the third surface, the circuit board being mechanically coupled to the space transformer substrate in a stack;

    a plurality of free-standing electrical connectors exhibiting at least elastic deformation behavior and connecting the second terminals and the third terminals, wherein the space transformer substrate and the printed circuit board are electrically connected in the stack; and

    adjustors that change a spacing between one or more portions of the space transformer substrate and the printed circuit board, with the electrical connectors maintaining the electrical connection between the space transformer substrate and the printed circuit board regardless of the spacing.

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