Pneumatic counterbalance for optical head gantry

• US 8,375,594 B1
• Filed: 06/09/2010
• Issued: 02/19/2013
• Est. Priority Date: 06/09/2010
• Status: Active Grant

• Current Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Original Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Inventors: Guenther, Bryan W.
• Primary Examiner(s): Bennett, G. Bradley
• Application Number:
  US12/797,436
• Time in Patent Office: 986 Days
• Field of Search: 335/03, 335/46, 335/51
• US Class Current: 33/503
• CPC Class Codes: B25J 19/0008 Balancing devices
• CPC Class Codes: B30B 15/0064 Counterbalancing means for movable press elements
• CPC Class Codes: G01B 21/047 Accessories, e.g. for positioning, for tool-setting, for measuring probes
• CPC Class Codes: G02B 7/001 Counterbalanced structures, e.g. surgical microscopes

Abstract

A pair of pneumatic cylinders is used to counterbalance the weight of a large gantry supporting the optical head of an interferometric profiler. The gantry is supported by the cylinders within pairs of linear-bearing rail that provide a large vertical travel. The pressure in the cylinders is adjusted so as to provide an upward force sufficient to oppose the weight of the gantry and prevent its descent, but not so great as to cause it to rise. In essence, the counterbalance pressure is adjusted to equilibrate the weight of the gantry in such a way that a small force applied manually upward or downward will cause the gantry to move easily in either direction, thereby making it possible for an operator to position the optical head rapidly and with minimum effort as required for the initial alignment with a test object.

Claims

1. A pneumatically counterbalanced gantry coupled to a support structure for translation relative to a test object, comprising:

a gantry including an instrument for performing surface measurements of a test object;

a structure mechanically coupled to the gantry so as to allow said translation of the gantry over a translation path, the translation being opposed by a friction force; and

a pneumatic system coupled to the gantry so as to oppose a movement of the gantry along said translation path;

wherein the pneumatic system is pressurized during operation of the gantry with a pressure sufficient to overcome a force producing said movement of the gantry, but said pressure is not large enough to also overcome said friction force.

2. The gantry of claim 1, wherein said force producing the movement of the gantry is the gantry'"'"'s weight and said movement is a descent of the gantry.

3. The gantry of claim 2, wherein said structure includes a linear bearing coupled to the gantry.

4. The gantry of claim 3, wherein said pneumatic system includes a cylinder aligned with the linear bearing along said translation path so as to oppose the descent of the gantry.

5. The gantry of claim 2, wherein said pneumatic system includes a cylinder aligned with said translation path so as to oppose a descent of the gantry.

6. The gantry of claim 2, wherein said pneumatic system includes a reservoir pneumatically coupled to the cylinder and a pressure regulator connected to the pneumatic system and to an air source.

7. The gantry of claim 2, wherein said pneumatic system includes a pressure regulator connected to the cylinder and to an air source.

8. The gantry of claim 2, wherein said structure includes two vertical linear bearings coupled to opposite sides of the gantry;

and said pneumatic system includes an air cylinder aligned with each of said linear bearings along said translation path so as to oppose the descent of the gantry.

9. The gantry of claim 8, wherein said pneumatic system further includes a reservoir pneumatically coupled to the air cylinders and a pressure regulator connected to the pneumatic system and to an air source.

10. The gantry of claim 8, wherein said pneumatic system includes a pressure regulator connected to the cylinders and to an air source.

11. A pneumatically counterbalanced gantry for an optical profilometer, comprising:

a gantry including an optical instrument;

a support structure including linear bearings mechanically coupled to the gantry for vertical translation of the gantry over a translation path, the translation being opposed by a friction force;

a pneumatic system including an air cylinder coupled to the gantry so as to oppose a descent of the gantry along said translation path;

a reservoir pneumatically coupled to the cylinder; and

a pressure regulator connected to the pneumatic system and to an air source,

wherein the pneumatic system is pressurized at all times of operation of the gantry with a pressure sufficient to overcome a downward force produced by the weight of the gantry, but said pressure is not large enough to also overcome said friction force.

12. The gantry of claim 11, wherein said gantry includes a safety mechanism for interrupting said descent of the gantry in case of failure of the pneumatic system.

13. The gantry of claim 11, wherein said gantry includes a crash-detection device for protecting an objective of said optical instrument.

14. The gantry of claim 11, wherein said gantry is pivotable over a horizontal axis.

15. Method of supporting a gantry with a counterbalance force for translation relative to a test object, comprising the steps of:

providing a structure mechanically coupled to the gantry so as to allow said translation of the gantry over a translation path, the translation being opposed by a friction force; and

providing a pneumatic system coupled to the gantry so as to oppose a descent of the gantry along said translation path;

wherein the pneumatic system is pressurized at all times of operation of the gantry with a pressure sufficient to overcome a downward force produced by the weight of the gantry, but said pressure is not large enough to also overcome said friction force.

16. The method of claim 15, wherein said structure includes a linear bearing coupled to the gantry.

17. The method of claim 16, wherein said pneumatic system includes a cylinder aligned with the linear bearing along said translation path so as to oppose the descent of the gantry.

18. The method of claim 15, wherein said pneumatic system includes a cylinder aligned with said translation path so as to oppose a descent of the gantry.

19. The method of claim 15, wherein said pneumatic system includes a reservoir pneumatically coupled to the cylinder and a pressure regulator connected to the pneumatic system and to an air source.

20. The method of claim 15, wherein said pneumatic system includes a pressure regulator connected to the cylinder and to an air source.

21. The method of claim 15, wherein said structure includes two vertical linear bearings coupled to opposite sides of the gantry;

and said pneumatic system includes an air cylinder aligned with each of said linear bearings along said translation path so as to oppose the descent of the gantry.

22. The method of claim 21, wherein said pneumatic system further includes a reservoir pneumatically coupled to the air cylinders and a pressure regulator connected to the pneumatic system and to an air source.

23. The method of claim 21, wherein said pneumatic system includes a pressure regulator connected to the cylinders and to an air source.