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Rotation rate sensor having a quadrature compensation pattern

  • US 8,375,786 B2
  • Filed: 08/24/2007
  • Issued: 02/19/2013
  • Est. Priority Date: 10/23/2006
  • Status: Active Grant
First Claim
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1. A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode, the second electrode having a first electrode surface and a second electrode surface which are situated opposite to each other, the first electrode being situated in an intermediate space between the first electrode surface and the second electrode surface, at least one of the first electrode surface and the second electrode surface being at a variable distance from the first electrode over an entire extension of the first electrode, wherein the first electrode surface and the second electrode surface of the second electrode are at an equal distance from each other over the entire extension of the first electrode.

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