Rotation rate sensor having a quadrature compensation pattern

• US 8,375,786 B2
• Filed: 08/24/2007
• Issued: 02/19/2013
• Est. Priority Date: 10/23/2006
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Neul, Reinhard
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US12/308,533
• Publication Number:
  US 20110126621A1
• Time in Patent Office: 2,006 Days
• Field of Search: 735/041.2, 735/041.4, 735/041.5, 735/041.6, 735/040.4, 735/040.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames

Abstract

A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode. The second electrode has a first electrode surface and a second electrode surface which are situated opposite to each other. The first electrode is situated in an intermediate space, between the first electrode surface and the second electrode surface. The first electrode surface and also the second electrode surface, over their extension, are at a different distance from the first electrode. The first electrode surface and the second electrode surface of the second electrode are at generally the same distance from each other, over their extension.

Claims

1. A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode, the second electrode having a first electrode surface and a second electrode surface which are situated opposite to each other, the first electrode being situated in an intermediate space between the first electrode surface and the second electrode surface, at least one of the first electrode surface and the second electrode surface being at a variable distance from the first electrode over an entire extension of the first electrode, wherein the first electrode surface and the second electrode surface of the second electrode are at an equal distance from each other over the entire extension of the first electrode.

2. The rotation-rate sensor as recited in claim 1, wherein the first electrode is plate-shaped.

3. The rotation-rate sensor as recited in claim 1, wherein the second electrode encloses the first electrode one of (a) annularly or (b) in a U-shaped manner.

4. The rotation-rate sensor as recited in claim 1, wherein the rotation-rate sensor has a plurality of quadrature compensation patterns that are arranged side by side.

5. The rotation-rate sensor as recited in claim 1, wherein the first electrode surface and the second electrode surface each have wall thicknesses of uniform thickness.